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Thermodynamic stabi...
Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations
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- Pedersen, Henrik (författare)
- Linköpings universitet,Kemi,Tekniska fakulteten
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- Alling, Björn (författare)
- Linköpings universitet,Teoretisk Fysik,Tekniska fakulteten
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- Högberg, Hans (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Ektarawong, Annop (författare)
- Linköpings universitet,Teoretisk Fysik,Tekniska fakulteten,Chulalongkorn Univ, Thailand; Commiss Higher Educ, Thailand
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(creator_code:org_t)
- A V S AMER INST PHYSICS, 2019
- 2019
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 37:4
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http://liu.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Thin films of boron nitride (BN), particularly the sp(2)-hybridized polytypes hexagonal BN (h-BN) and rhombohedral BN (r-BN), are interesting for several electronic applications, given the bandgaps in the UV. They are typically deposited close to thermal equilibrium by chemical vapor deposition (CVD) at temperatures and pressures in the regions 1400-1800K and 1000-10000Pa, respectively. In this letter, the authors use the van der Waals corrected density functional theory and thermodynamic stability calculations to determine the stability of r-BN and compare it to that of h-BN as well as to cubic BN and wurtzitic BN. The authors find that r-BN is the stable sp(2)-hybridized phase at CVD conditions, while h-BN is metastable. Thus, their calculations suggest that thin films of h-BN must be deposited far from thermal equilibrium.
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
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