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Synthesis, Structur...
Synthesis, Structure and Thermal Properties of Volatile Indium and Gallium Triazenides
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- Samii, Rouzbeh, 1986- (författare)
- Linköpings universitet,Kemi,Tekniska fakulteten
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- Buttera, Sydney C. (författare)
- Carleton Univ, Canada
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- Kessler, Vadim (författare)
- Swedish University of Agricultural Sciences,Sveriges lantbruksuniversitet,Institutionen för Molekylära vetenskaper,Department of Molecular Sciences,Swedish Univ Agr Sci, Sweden
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- O´brien, Nathan (författare)
- Linköpings universitet,Kemi,Tekniska fakulteten
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(creator_code:org_t)
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- 2022-08-10
- 2022
- Engelska.
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Ingår i: European Journal of Inorganic Chemistry. - : Wiley-V C H Verlag GMBH. - 1434-1948 .- 1099-1948 .- 1099-0682. ; :24
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Abstract
Ämnesord
Stäng
- Indium and gallium nitride are important semi-conductor materials with desirable properties for high-frequency and power electronics. We have previously demonstrated high-quality ALD grown InN and GaN using the hexacoordinated 1,3-diisopropyltriazenide In(III) and Ga(III) precursors. Herein we report the structural and thermal properties their analogues employing combinations of isopropyl, sec-butyl and tert-butyltriazenide alkyl groups on the exocyclic nitrogen of the triazenide ligand. The new triazenide compounds were all found to be volatile (80-120 degrees C, 0.5 mbar) and showed very good thermal stability (200 and 300 degrees C). These new triazenide analogues provide a set of precursors whose thermal properties are determined and can be accordingly tailored by strategic choice of exocyclic nitrogen alkyl substituents.
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Nyckelord
- Gallium; Indium; Precursors; Triazenides; Volatile
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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