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Synthesis, Structur...
Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition
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- Samii, Rouzbeh, 1986- (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
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- Fransson, Anton (author)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska fakulteten
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- Mpofu, Pamburayi (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
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- Niiranen, Pentti (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
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- Ojamäe, Lars, 1964- (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
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- Kessler, Vadim (author)
- Swedish University of Agricultural Sciences,Sveriges lantbruksuniversitet,Institutionen för Molekylära vetenskaper,Department of Molecular Sciences,Swedish Univ Agr Sci, Sweden
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- O´brien, Nathan (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
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(creator_code:org_t)
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- 2022-12-14
- 2022
- English.
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In: Inorganic Chemistry. - : AMER CHEMICAL SOC. - 0020-1669 .- 1520-510X. ; 61:51, s. 20804-20813
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Abstract
Subject headings
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- Group 11 thin films are desirable as interconnects in microelectronics. Although many M-N-bonded Cu precursors have been explored for vapor deposition, there is currently a lack of suitable Ag and Au derivatives. Herein, we present monovalent Cu, Ag, and Au 1,3-di-tert-butyltriazenides that have potential for use in vapor deposition. Their thermal stability and volatility rival that of current state-of-the-art group 11 precursors with bidentate M-N-bonded ligands. Solution-state thermolysis of these triazenides yielded polycrystalline films of elemental Cu, Ag, and Au. The compounds are therefore highly promising as single-source precursors for vapor deposition of coinage metal films.
Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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