New NO2 sensor based on Au gate field effect devices

• A new NO2 field effect gas sensor based on Au gates is demonstrated and the influence of gate morphology on sensor response is evaluated. A sensitization mechanism, for non-catalytic continuous gates, based on grain boundary diffusion is proposed. The sensors are fabricated as MOS (metal-oxide-semiconductor) capacitors with sputtered or thermal evaporated Au gates (at different substrate temperatures) with thickness between 75 and 960 nm. The devices' sensitivity, in the range of 15-200 ppm of NO2 in dry air, depends strongly on gate morphology, shorter response times and larger voltage shifts are correlated with smaller grain sizes. Scanning-electron-microscope (SEM) images show that the microstructure is very stable after 5 months of gas exposure at temperatures up to 200°C. The sensors are selective to NO2 (with NO, H2 and CO as interfering gases) and selectivity depends also on gate structure. © 2001 Elsevier Science B.V. All rights reserved.

Nyckelord

Chemical gas sensor

Field effect

Gold gates

Nitrogen dioxide

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