SiC based gas sensors and their applications

• The development and field-testing of hardy high-temperature sensors based on silicon carbide devices has to date shown promising results in several application areas. As the need to take care of the environment becomes more urgent, these small and relatively cheap sensors could be used to increase the monitoring of gases, or to replace or complement larger and more expensive sensor technologies used today. In this paper the development of Silicon Carbide MOSFET transistor sensors and Schottky diode sensors is described. The devices are tested in industrial applications such as monitoring of car exhausts and flue gases.

Nyckelord

car exhausts

electronic nose

flue gases

gas sensors

MOSFET

Schottky diodes

TECHNOLOGY

TEKNIKVETENSKAP

Publikations- och innehållstyp

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