Search: id:"swepub:oai:DiVA.org:liu-49436" >
Characterization of...
Characterization of anisotropic step-bunching on as-grown SiC surfaces
-
- Syväjärvi, Mikael (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
- Yakimova, Rositsa (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
- Iakimov, Tihomir (author)
- Linköpings universitet,Halvledarmaterial
-
show more...
-
- Janzén, Erik (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
show less...
-
(creator_code:org_t)
- Trans Tech Publications Inc. 2000
- 2000
- English.
-
In: Materials Science Forum, Vols. 338-343. - : Trans Tech Publications Inc.. - 9780878498543 - 0878498540 ; , s. 375-378
- Related links:
-
http://tdl.libra.tit...
-
show more...
-
https://urn.kb.se/re...
-
https://doi.org/10.4...
-
show less...
Abstract
Subject headings
Close
- We report the presence of anisotropic step-bunching in SiC epitaxy on off-oriented substrates. This is an effect of step-flow growth. The anisotropic step-bunching is discussed in relation to the temperature dependence of lateral growth velocities and the interface roughness. The macrostep appearance is probably related to formation of morphologically stable faces with low surface free energy.
Keyword
- anisotropy
- lateral growth
- step bunching
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- kon (subject category)
Find in a library
To the university's database