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Magnetron Sputter E...
Magnetron Sputter Epitaxy of GaN
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- Junaid, Muhammad (författare)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
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- Birch, Jens, Professor (preses)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars, Professor (preses)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Darakchieva, Vanya, Docent (opponent)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
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(creator_code:org_t)
- ISBN 9789173932264
- Linköping : Linköping University Electronic Press, 2011
- Engelska 35 s.
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Serie: Linköping Studies in Science and Technology. Thesis, 0280-7971 ; 1470
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Abstract
Ämnesord
Stäng
- Electronic-grade GaN (0001) epilayers have been grown directly on Al2O3 (0001) substrates by reactive DC-magnetron sputter epitaxy (MSE) from a liquid Ga sputtering target in an Ar/N2 atmosphere. The as-grown GaN epitaxial film exhibit low threading dislocation density on the order of ≤ 1010 cm-2 obtained by transmission electron microscopy and modified Williamson-Hall plot. X-ray rocking curve shows narrow fullwidth at half maximum (FWHM) of 1054 arcsec of the 0002 reflection. A sharp 4 K photoluminescence peak at 3.474 eV with a FWHM of 6.3 meV is attributed to intrinsic GaN band edge emission. The high structural and optical qualities indicate that MSEgrown GaN epilayers can be used for fabricating high-performance devices without the need of any buffer layer. GaN (0001) thin films were grown on Al2O3 substrates by reactive high power impulse magnetron sputtering of liquid Ga targets in a mixed N2/Ar discharge. A combination of x-ray diffraction, electron microscopy, atomic force microscopy, μ-Raman microscopy, photoluminescence, time of flight elastic recoil detection, and cathodoluminescence showed the formation of both relaxed and strained domains in the same films. . While the strained domains form due to ion bombardment during growth. The relaxed domains exhibit superior structural and optical properties comparative to the strained domains, including room temperature luminescence.
Nyckelord
- NATURAL SCIENCES
- NATURVETENSKAP
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