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Processing of silic...
Processing of silicon UV-photodetectors
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- Thungström, Göran (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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- Dubaric, Ervin (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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- Svensson, B.G. (författare)
- Royal Institute of Technology, Dept. Electronics, Electrum 229, S., Stockholm
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(creator_code:org_t)
- 2001
- 2001
- Engelska.
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Ingår i: Nuclear Instruments and Methods in Physics Research Section A. - 0168-9002 .- 1872-9576. ; 460:1, s. 165-184
- Relaterad länk:
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https://urn.kb.se/re...
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visa fler...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- UV-enhanced photodetectors of both n+-p and p+-n type have been processed in silicon. Photodetectors of the p+-n type display a responsivity close to the theoretical limit with an antireflective coating of either thermally grown dry silicon dioxide or deposited oxide (TEOS), followed by a short wet oxidizing step. This holds, irrespective of whether the detector window is doped by boron through ion implantation or diffusion from a solid source. However, for p+-n photodiodes with a TEOS-oxide in the as-deposited state the responsivity decreases substantially for wavelenghts below 500 nm compared to the theoretical predictions. This is attributed to a high recombination velocity at the silicon dioxide/silicon interface, as supported by computer simulations of the detector performance. In contrast, n+-p photodiodes are found to be rather insensitive with respect to the properties of the silicon dioxide/silicon interface. These results provide the first experimental demonstration that high built in electric fields, caused by abrupt dopant profiles, can suppress the influence of a high interface carrier recombination velocity.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- ultra violet detectors processing
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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