Gridded Duo-lateral Position Sensitivity Detector with High Linearity to Low Energetic Electrons in Vacuum Environment

• Characterizing a position sensitive detector in a vacuum environment without beam position monitoring devices can bechallenging and expensive. With this in mind, we have designed and fabricated a duo-lateral position sensitive detector (PSD) incorporatedwith simple and inexpensive surface features. It was evaluated using scanning electron microscopy. To assist in pinpointing precise positioningas well as acting as path guide during the sweeping of electrons, multiple grids were lithographically patterned on the top layer of the duolateralPSD. By sweeping electrons along two axes of the detector, the position detection error of both axes was determined from the signalsrecorded using a transimpedance amplification circuit. We were able to characterize the linearity over the x- and y-axis of the PSD and theresults show a very high linearity over two-dimensions of the PSD’s active area and that accurate beam monitoring for spectroscopic measurement without additional beam position monitoring devices is possible.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

position sensitive particle detectors

scanning electron microscopy

gridded duo-lateral position sensitivity detector

high linearity

low energetic electrons

vacuum environment

scanning electron microscopy

lithographically patterned multiple grids

position detection error

transimpedance amplification circuit

spectroscopic measurement

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)