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Processing and Char...
Processing and Characterization of a MOS Type Tetra Lateral Position Sensitive Detector with Indium Tin Oxide Gate Contact
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- Andersson, Henrik (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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- Bertilsson, Kent (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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- Thungström, Göran (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division
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- Nilsson, Hans-Erik (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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(creator_code:org_t)
- 2008
- 2008
- Engelska.
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 8:9-10, s. 1704-1709
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- A 2-D tetra lateral position sensitive detector (PSD) based on the metal-oxide-semiconductor (MOS) principle has been manufactured and characterized. The active area of the device is 5 nun x 5 mm and the intention is to use the central 4 nun x 4 nun for low nonlinearity measurements. The gate contact is made of indium tin oxide (ITO) that is a degenerate electrically conducting semiconductor, which, in addition, is also transparent in the visible part of the spectrum. The use of a MOS structure results in a processing with no necessity to use implantation or diffusion in order to make the resistive p-layer as in a conventional p-n junction lateral effect PSD. Position measurements show good linearity in the middle 4 nun x 4 mm area. Within the middle 2.1 mm x 2.1 mm, the nonlinearity is within 1.7% of the active area with a position detection error of maximum 60 mu m. Measured MOS IV characteristics are compared to a level 3 spice model fit and show good agreement. The threshold voltage is determined to be -0.03 V. Responsivity measurements show a high sensitivity in the visible spectral region.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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