A novel 3-axis monolithic silicon accelerometer

• Working prototypes of a novel 3 axis monolithic silicon accelerometer have been manufactured at Chalmers University of Technology in co operation with Saab Combitech AB and the Department of Solid State Electronics. Experience from the prototypes is most encouraging as they have confirmed the theoretical predictions of negligible cross-axis sensitivity. The accuracy in the separation of an arbitrary directed acceleration into acceleration vectors in a Cartesian system of coordinates has shown to be high almost beyond expectation. The accelerometer has good potential to develop into a low cost 3 axis accelerometer in the 0 2 g range with a resolution of about 10 mg. This in part due to the simple manufacturing process.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

MEMS

3-axis

Accelerometer

Quad-Slanted Beam

Publikations- och innehållstyp

ref (ämneskategori)

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