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Epitaxial growth of...
Epitaxial growth of by reactive high-power impulse magnetron sputtering
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- Eklund, Per (författare)
- RISE,SP Elektronik,Linköping University, Sweden
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- Frodelius, Jenny (författare)
- Linköping University, Sweden
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- Hultman, Lars G. (författare)
- Linköping University, Sweden
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- Lu, Jun (författare)
- Linköping University, Sweden
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(creator_code:org_t)
- AIP Publishing, 2014
- 2014
- Engelska.
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Ingår i: AIP Advances. - : AIP Publishing. - 2158-3226. ; 4:1
- Relaterad länk:
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https://aip.scitatio...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Al2O3 was deposited by reactive high-power impulse magnetron sputtering at 600 C onto pre-deposited Ti2AlC(0001) thin films on Al2O3(0001) substrates. The Al2O 3 was deposited to a thickness of 65 nm and formed an adherent layer of epitaxial γ-Al2O3(111) as shown by transmission electron microscopy. The demonstration of epitaxial growth of γ-Al 2O3 on Ti2AlC(0001) open prospects for growth of crystalline alumina as protective coatings on Ti2AlC and related nanolaminated materials. The crystallographic orientation relationships are γ-Al2O3(111)//Ti2AlC(0001) (out-of-plane) and Al2O3//Ti2AlC(112̄0)γ-Al 2O3(22̄0)// Ti 2 AlC (112̄0) (in-plane) as determined by electron diffraction. Annealing in vacuum at 900 C resulted in partial decomposition of the Ti2AlC by depletion of Al and diffusion into and through the γ-Al2O3 layer.
Nyckelord
- Annealing in vacuum
- Crystallographic orientation relationships
- Out-of-plane
- Partial decomposition
- Alumina
- Epitaxial growth
- Growth (materials)
- Magnetron sputtering
- Protective coatings
- Transmission electron microscopy
- Aluminum
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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