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Oxygen out-diffusio...
Oxygen out-diffusion from buried layers in SOI and SiC-SOI substrates
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- Li, Ling-Guang, 1982- (författare)
- Uppsala universitet,Fasta tillståndets elektronik,komponentgrupp
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- Vallin, Örjan (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Lu, Jun (författare)
- Uppsala universitet,Mikrostrukturlaboratoriet, MSL
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- Smith, Ulf (författare)
- Uppsala universitet,Fasta tillståndets elektronik,komponentgrupp
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- Norström, Hans (författare)
- Uppsala universitet,Fasta tillståndets elektronik,komponentgrupp
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- Olsson, Jörgen (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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(creator_code:org_t)
- Elsevier BV, 2010
- 2010
- Engelska.
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Ingår i: Solid-State Electronics. - : Elsevier BV. - 0038-1101 .- 1879-2405. ; 54:2, s. 153-157
- Relaterad länk:
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https://uu.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We have made a comparative study of the oxygen out-diffusion process during heat treatment of SOI wafers and SiC-SOI hybrid substrates. SOI materials with three different thicknesses (2, 20 and 410 nm) of buried oxide (BOX) were used in the investigation High-resolution cross-sectional transmission electron microscopy (HRXTEM) together with laser interferometry was used to determine the remaining thickness of the BOX-layer after heat treatment. After complete removal of the BOX-layer of SOI wafers, the St/Si interface appears to be sharp and defect-free. Similar results were obtained for SiC-SOI hybrid substrates after removal of the entire buried oxide layer. For all combinations investigated oxide removal was accompanied by a thickness reduction and roughening of the silicon surface layer as verified by atomic force microscopy (AFM).
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Oxygen out-diffusion
- SOI
- silicon carbide
- SiC-SOI
- Semiconductor physics
- Halvledarfysik
- Engineering Science with specialization in Electronics
- Teknisk fysik med inriktning mot elektronik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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