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Growth and structur...
Growth and structural properties of Mg:C thin films prepared by magnetron sputtering
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- Ingason, A. S. (författare)
- University of Iceland
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- Eriksson, A. K. (författare)
- University Iceland
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- Lewin, Erik (författare)
- Uppsala universitet,Oorganisk kemi,Uppsala University
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- Jensen, Jens (författare)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
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- Olafsson, S. (författare)
- University of Iceland
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(creator_code:org_t)
- Elsevier BV, 2010
- 2010
- Engelska.
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Ingår i: Thin Solid Films. - : Elsevier BV. - 0040-6090 .- 1879-2731. ; 518:15, s. 4225-4230
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investigated using X-ray diffraction measurements and the elemental composition and binding in the films is determined using elastic recoil detection analysis and X-ray photoelectron spectroscopy. The results show that during co-sputtering the carbon flux influences the initial stages of the film growth. The films are made of polycrystalline magnesium grains embedded in a carbon network, the size of which depends on the carbon content, but amorphous phases cannot be excluded. The XPS measurements show the presence of carbidic carbon whereas X-ray measurements find no Mg:C phases. The overall stability of the films is found to depend on the carbon content, where stable films capped with a 14 nm Pd layer cannot be obtained with carbon content above 18%.
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Nyckelord
- Magnesium
- Carbon
- In-situ resistance measurements
- X-ray photoelectron spectroscopy
- Magnetron sputtering
- X-ray diffraction
- Elastic recoil detection analysis
- Inorganic chemistry
- Oorganisk kemi
- Kemi med inriktning mot oorganisk kemi
- Chemistry with specialization in Inorganic Chemistry
- TECHNOLOGY
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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