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Influence of SOI-ge...
Influence of SOI-generated stress on BiCMOS performance
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- Johansson, Ted (author)
- KTH,Skolan för informations- och kommunikationsteknik (ICT)
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Malm, B. Gunnar (author)
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Norström, Hans (author)
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- Smith, Ulf (author)
- Uppsala universitet,Materialvetenskap
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- Östling, Mikael (author)
- KTH,Integrerade komponenter och kretsar
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- Malin, B. Gunnar (author)
- KTH,Integrerade komponenter och kretsar
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(creator_code:org_t)
- Elsevier BV, 2006
- 2006
- English.
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In: Solid-State Electronics. - : Elsevier BV. - 0038-1101 .- 1879-2405. ; 50:6, s. 935-942
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Subject headings
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- Two BiCMOS processes were adapted for SOI and the performance of the bipolar devices was studied. Differences in electrical parameters were observed, in particular the current gain, which processing or doping profiles could not explain, but correlated with observed stress in transistors. Simulation of the process flow with stress included revealed that stress was generated to a higher degree in the SOI wafers in the presence of deep trench isolation (DTI). Theoretical estimations and electrical simulations with and without stress yielded results consistent with observed data. Thus, we conclude that the observed differences are caused by process-induced in-plane biaxial stress.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- BiCMOS
- SOI
- Silicon-on-insulator
- Trench isolation
- Bipolar
- Electronics
- Elektronik
- Other materials science
- Övrig teknisk materialvetenskap
Publication and Content Type
- ref (subject category)
- art (subject category)
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