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Resistive graphene humidity sensors with rapid and direct electrical readout

Smith, Anderson D. (författare)
KTH,Integrerade komponenter och kretsar,KTH Royal Inst Technol, Dept EKT, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.,KTH Royal Institute of Technology; Department of EKT;School of Information and Communication Technology;SE-16440 Kista, Sweden
Elgammal, Karim, 1986- (författare)
KTH,Materialfysik, MF,Anna Delin Group,KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.,KTH Royal Institute of Technology; Department of Materials and Nano Physics;School of Information and Communication Technology;SE-16440 Kista, Sweden
Niklaus, Frank (författare)
KTH,Mikro- och nanosystemteknik,KTH Royal Inst Technol, Dept Micro & Nano Syst, Sch Elect Engn, SE-10044 Stockholm, Sweden.,KTH Royal Institute of Technology; Department of Micro and Nano Systems;School of Electrical Engineering;SE-10044 Stockholm, Sweden
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Delin, Anna (författare)
KTH,Uppsala universitet,Materialteori,KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.;KTH Royal Inst Technol, SeRC Swedish E Sci Res Ctr, SE-10044 Stockholm, Sweden.,Materialfysik, MF,Mikro- och nanosystemteknik,SeRC - Swedish e-Science Research Centre,KTH Royal Institute of Technology; Department of Materials and Nano Physics;School of Information and Communication Technology;SE-16440 Kista, Sweden;Uppsala University
Fischer, Andreas C. (författare)
KTH,Mikro- och nanosystemteknik,KTH Royal Inst Technol, Dept Micro & Nano Syst, Sch Elect Engn, SE-10044 Stockholm, Sweden.,KTH Royal Institute of Technology; Department of Micro and Nano Systems;School of Electrical Engineering;SE-10044 Stockholm, Sweden
Vaziri, Sam (författare)
KTH,Integrerade komponenter och kretsar,KTH Royal Inst Technol, Dept EKT, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.,KTH Royal Institute of Technology; Department of EKT;School of Information and Communication Technology;SE-16440 Kista, Sweden
Forsberg, Fredrik (författare)
KTH,Mikro- och nanosystemteknik,KTH Royal Inst Technol, Dept Micro & Nano Syst, Sch Elect Engn, SE-10044 Stockholm, Sweden.,KTH Royal Institute of Technology; Department of Micro and Nano Systems;School of Electrical Engineering;SE-10044 Stockholm, Sweden
Råsander, Mikael (författare)
KTH,Materialfysik, MF,KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.;Univ London Imperial Coll Sci Technol & Med, Dept Mat, London SW7 2AZ, England.,KTH Royal Institute of Technology; Department of Materials and Nano Physics;School of Information and Communication Technology;SE-16440 Kista, Sweden;Department of Materials
Hugosson, Håkan (författare)
KTH,Materialfysik, MF,KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.,KTH Royal Institute of Technology; Department of Materials and Nano Physics;School of Information and Communication Technology;SE-16440 Kista, Sweden
Bergqvist, Lars (författare)
KTH,Materialfysik, MF,SeRC - Swedish e-Science Research Centre,KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.;KTH Royal Inst Technol, SeRC Swedish E Sci Res Ctr, SE-10044 Stockholm, Sweden.,KTH Royal Institute of Technology; Department of Materials and Nano Physics;School of Information and Communication Technology;SE-16440 Kista, Sweden;SeRC (Swedish e-Science Research Center)
Schröder, Stephan (författare)
KTH,Mikro- och nanosystemteknik,KTH Royal Inst Technol, Dept Micro & Nano Syst, Sch Elect Engn, SE-10044 Stockholm, Sweden.,KTH Royal Institute of Technology; Department of Micro and Nano Systems;School of Electrical Engineering;SE-10044 Stockholm, Sweden
Kataria, Satender (författare)
Univ Siegen, D-57076 Siegen, Germany.,University of Siegen, 57076 Siegen, Germany
Östling, Mikael (författare)
KTH,Integrerade komponenter och kretsar,KTH Royal Inst Technol, Dept EKT, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.,KTH Royal Institute of Technology; Department of EKT; School of Information and Communication Technology;SE-16440 Kista, Sweden
Lemme, Max C. (författare)
KTH,Integrerade komponenter och kretsar,KTH Royal Inst Technol, Dept EKT, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.;Univ Siegen, D-57076 Siegen, Germany.,KTH Royal Institute of Technology; Department of EKT;School of Information and Communication Technology;SE-16440 Kista, Sweden;University of Siegen
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 (creator_code:org_t)
2015
2015
Engelska.
Ingår i: Nanoscale. - : Royal Society of Chemistry (RSC). - 2040-3364 .- 2040-3372. ; 7:45, s. 19099-19109
Relaterad länk:
https://doi.org/10.1...
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https://uu.diva-port... (primary) (Raw object)
https://pubs.rsc.org...
https://urn.kb.se/re...
https://doi.org/10.1...
https://urn.kb.se/re...
https://urn.kb.se/re...
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  • Tidskriftsartikel (refereegranskat)
Abstract Ämnesord
Stäng  
  • We demonstrate humidity sensing using a change of the electrical resistance of single-layer chemical vapor deposited (CVD) graphene that is placed on top of a SiO2 layer on a Si wafer. To investigate the selectivity of the sensor towards the most common constituents in air, its signal response was characterized individually for water vapor (H2O), nitrogen (N-2), oxygen (O-2), and argon (Ar). In order to assess the humidity sensing effect for a range from 1% relative humidity (RH) to 96% RH, the devices were characterized both in a vacuum chamber and in a humidity chamber at atmospheric pressure. The measured response and recovery times of the graphene humidity sensors are on the order of several hundred milliseconds. Density functional theory simulations are employed to further investigate the sensitivity of the graphene devices towards water vapor. The interaction between the electrostatic dipole moment of the water and the impurity bands in the SiO(2)d substrate leads to electrostatic doping of the graphene layer. The proposed graphene sensor provides rapid response direct electrical readout and is compatible with back end of the line (BEOL) integration on top of CMOS-based integrated circuits.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)
NATURVETENSKAP  -- Fysik -- Annan fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Other Physics Topics (hsv//eng)
NATURVETENSKAP  -- Kemi -- Annan kemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Other Chemistry Topics (hsv//eng)
NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
NATURVETENSKAP  -- Kemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences (hsv//eng)

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