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Understanding the m...
Understanding the microwave annealing of silicon
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- Fu, Chaochao (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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- Wang, Yan (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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- Xu, Peng (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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- Yue, Lei (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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- Sun, Feng (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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- Zhang, David Wei (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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- Zhang, Shi-Li (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Luo, Jun (författare)
- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
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- Zhao, Chao (författare)
- Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
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- Wu, Dongping (författare)
- Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China.
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Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China Fasta tillståndets elektronik (creator_code:org_t)
- AMER INST PHYSICS, 2017
- 2017
- Engelska.
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Ingår i: AIP Advances. - : AMER INST PHYSICS. - 2158-3226. ; 7:3
- Relaterad länk:
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https://uu.diva-port... (primary) (Raw object)
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https://aip.scitatio...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Though microwave annealing appears to be very appealing due to its unique features, lacking an in-depth understanding and accurate model hinder its application in semiconductor processing. In this paper, the physics-based model and accurate calculation for the microwave annealing of silicon are presented. Both thermal effects, including ohmic conduction loss and dielectric polarization loss, and non-thermal effects are thoroughly analyzed. We designed unique experiments to verify the mechanism and extract relevant parameters. We also explicitly illustrate the dynamic interaction processes of the microwave annealing of silicon. This work provides an in-depth understanding that can expedite the application of microwave annealing in semiconductor processing and open the door to implementing microwave annealing for future research and applications.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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Till lärosätets databas
- Av författaren/redakt...
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Fu, Chaochao
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Wang, Yan
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Xu, Peng
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Yue, Lei
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Sun, Feng
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Zhang, David Wei
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visa fler...
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Zhang, Shi-Li
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Luo, Jun
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Zhao, Chao
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Wu, Dongping
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visa färre...
- Om ämnet
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- TEKNIK OCH TEKNOLOGIER
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TEKNIK OCH TEKNO ...
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och Nanoteknik
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- NATURVETENSKAP
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NATURVETENSKAP
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och Fysik
- Artiklar i publikationen
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AIP Advances
- Av lärosätet
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Uppsala universitet