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High Aspect Ratio N...
High Aspect Ratio Nanoscale Pores through BCP-Based Metal Oxide Masks and Advanced Dry Etching
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- Esmeraldo Paiva, Aislan (författare)
- Trinity College Dublin
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- Gerlt, Michael S (författare)
- Lund University,Lunds universitet,Institutionen för biomedicinsk teknik,Institutioner vid LTH,Lunds Tekniska Högskola,Department of Biomedical Engineering,Departments at LTH,Faculty of Engineering, LTH,ETH Zürich
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- Läubli, Nino F (författare)
- Cambridge University Hospitals NHS Foundation Trust
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- Prochukhan, Nadezda (författare)
- Trinity College Dublin
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- Baez Vasquez, Jhonattan Frank (författare)
- Trinity College Dublin
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- Kaminski Schierle, Gabriele S (författare)
- Cambridge University Hospitals NHS Foundation Trust
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- Morris, Michael A (författare)
- Trinity College Dublin
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(creator_code:org_t)
- 2023
- 2023
- Engelska 10 s.
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Ingår i: ACS applied materials & interfaces. - 1944-8244. ; 15:50, s. 57960-57969
- Relaterad länk:
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http://dx.doi.org/10... (free)
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https://lup.lub.lu.s...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The reliable and regular modification of the surface properties of substrates plays a crucial role in material research and the development of functional surfaces. A key aspect of this is the development of the surface pores and topographies. These can confer specific advantages such as high surface area as well as specific functions such as hydrophobic properties. Here, we introduce a combination of nanoscale self-assembled block-copolymer-based metal oxide masks with optimized deep reactive ion etching (DRIE) of silicon to permit the fabrication of porous topographies with aspect ratios of up to 50. Following the evaluation of our procedure and involved parameters using various techniques, such as AFM or SEM, the suitability of our features for applications relying on high light absorption as well as efficient thermal management is explored and discussed in further detail.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
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