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Effect of Si cap layer on parasitic channel operation in Si/SiGe metal-oxide-semiconductor structures

Sareen, Alok, 1972 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Wang, Y. (author)
Södervall, Ulf, 1954 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Lundgren, Per, 1968 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Bengtsson, Stefan, 1961 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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 (creator_code:org_t)
2003
2003
English.
In: Journal Of Applied Physics. ; 93:6, s. 3545-3552
  • Journal article (peer-reviewed)
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TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

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