Study of NbN Ultra-thin Films for THz Hot-electron Bolometers

• Hot-electron bolometer (HEB) mixers based on superconducting ultra-thin NbN films are largely used for THz spectroscopy for space and ground-based observations. Performance of the HEB mixers directly depends on the details of the structure and composition of thin film surface, as well as the nitrogen composition and its depth distribution. In this work, we present the study of the composition and the surface oxidation state of NbN films grown at two different temperatures and of 5 and 10 nm thickness.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Bearbetnings-, yt- och fogningsteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Manufacturing, Surface and Joining Technology (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Övrig annan teknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Nyckelord

thin films

Hot-electron bolometers

surface analysis

NbN

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