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High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air
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- Dahmardeh, M. (författare)
- University of British Columbia (UBC)
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- Khalid, Waqas, 1983 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Mohamed Ali, M.S. (författare)
- University of British Columbia (UBC),Universiti Teknologi Malaysia
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- Choi, Y. (författare)
- Jungwon University
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- Yaghoobi, P. (författare)
- University of British Columbia (UBC)
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- Nojeh, A. (författare)
- University of British Columbia (UBC)
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- Takahata, K. (författare)
- University of British Columbia (UBC)
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(creator_code:org_t)
- ISBN 9781424496327
- 2011
- 2011
- Engelska.
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Ingår i: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - 1084-6999. - 9781424496327 ; , s. 272-275
- Relaterad länk:
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http://dx.doi.org/10...
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https://doi.org/10.1...
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https://research.cha...
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Abstract
Ämnesord
Stäng
- This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of electrical discharge to locally machine the nanotubes in order to create target shapes in a forest. With this approach, forest microstructures can be fabricated to have varying shapes along their height, unachievable with conventional pre-patterned chemical vapor deposition growth techniques. The use of the pulses with a minimized discharge energy defined with 35 V and 10 pF in the discharge generation circuit leads to an aspect ratio of 20 with the smallest feature of 5 μm in forests without disordering the vertical orientation of the nanotubes. Micromachining of multilayer geometries as well as arrayed needle-like microstructures with angled surfaces is demonstrated.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- vet (ämneskategori)
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