Sökning: id:"swepub:oai:research.chalmers.se:587fa082-cd0c-4aca-b7cd-a1cb91ae5e1a" >
research and develo...
research and development of SiC Static Induction transistor
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- Dynefors, Kristina, 1977 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Desmaris, Vincent, 1977 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Eriksson, Joakim, 1969 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa fler...
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- Rorsman, Niklas, 1964 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Zirath, Herbert, 1955 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa färre...
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(creator_code:org_t)
- 2003
- 2003
- Engelska.
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Ingår i: GHz2003 conference, Linköping 2003.
- Relaterad länk:
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https://research.cha...
Abstract
Ämnesord
Stäng
- A fabrication process for SiC Static Induction Transistors (SITs) is developed and tested. Simulated and measured results of the device are presented. The complete fabrication process involves only 5 lithography steps, due to the self-aligned process used for mesa, ohmic contacts and gates. This makes the process fast and minimize the risk of process errors. Only optical lithography is used in the process, why dimensions are not optimised. Mesa widths of 2, 3, 4 and 5 µm are processed. Since the process is scalable, better performance can be expected with smaller widths achieved by the use electron beam lithography. Preliminary results indicate FET operation with a maximum current density of 110 mA/mm.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publikations- och innehållstyp
- kon (ämneskategori)
- vet (ämneskategori)