60 GHz broadband 0=1-level RF-via interconnect for RF-MEMS packaging

• The RF-via interconnect structure from the 0- to the 1-level packagefor coplanar RF-MEMS devices packaging is evaluated. The 0=1-levelinterconnect structure was designed and optimised using the electromagneticsimulation tool. The structure was then successfully fabricatedand characterised up to 67 GHz. The measured and simulatedresults show good agreement, demonstrating DC-to-60 GHz broadbandinterconnect performance through the two levels package

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

RF via interconnect

Publikations- och innehållstyp

art (ämneskategori)

ref (ämneskategori)