Sökning: id:"swepub:oai:research.chalmers.se:70019684-960d-4bae-a7d6-c1637e8194ed" >
Micro-electromechan...
Micro-electromechanical arrangement
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Alping, Arne, 1953 (författare)
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- Gevorgian, Spartak, 1948 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- 2002
- Engelska.
- Relaterad länk:
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https://research.cha...
Abstract
Ämnesord
Stäng
- The present invention refers to a variable capacitor comprising a first conductive layer, a second conductive layer and a semiconductor layer, the first and second layers being arranged to be displaced relative to each other under the influence of an electrostatically generated force. The semiconductor layer constitutes a voltage generator, which when exposed to a radiation produces a voltage for charging the first and second conductive layers and induces the electrostatically generated force
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publikations- och innehållstyp
- pat (ämneskategori)
- vet (ämneskategori)