60 GHz Broadband MS-to-CPW Hot-Via Flip Chip Interconnects

• In this letter, the microstrip-to-coplanar waveguide(MS-to-CPW) hot-via flip chip interconnect has been experimentallydemonstrated to have broadband performance from dc to67 GHz. The interconnect structures with the hot-via transitions were first designed and optimized by using the electromagnetic simulation tool. Three types of designs were investigated in this letter. The interconnect structures were then fabricated and radio frequency (RF) tested up to 67 GHz. The optimized interconnectstructure with the compensation design demonstrated excellent RFcharacteristics with the insertion loss less than 0.5 dB and the returnloss below 18 dB over a very broad bandwidth from dc to67 GHz. This is to our

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TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

MS-to-CPW Hot-Via Flip Chip Interconnects

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