Second order effects of aspect ratio variations in high sensitivity grating couplers

• In the following article we present our developments on how the geometrical parameters modify a grating-coupler sensitivity. Different sensors were fabricated, starting from the thin grating approximation (TGA), where the grating thickness is deprecated. Then, these devices were modified by varying etching depths and duty cycles. The sensors were modeled utilizing the equivalent layer approximation (ELA), and then the coupling angles were measured in the optical bench, showing an excellent agreement between model and reality. The same approximation was used to investigate how to improve the sensitivity of these devices. Another focus of attention was the integration of screen SiO2 layers over some grating paths for in-coupling and reference purposes.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Finite depth grating

Optical biosensor

e-Beam lithography

Grating coupler

Publikations- och innehållstyp

art (ämneskategori)

ref (ämneskategori)