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Low Partial Pressur...
Low Partial Pressure Chemical Vapor Deposition of Graphene on Copper
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- Sun, Jie, 1977 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Lindvall, Niclas, 1985 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Cole, Matthew (author)
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Angel, Koh (author)
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- Wang, Teng, 1983 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Teo, Ken (author)
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Chua, Daniel (author)
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- Liu, Johan, 1960 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Yurgens, Avgust, 1959 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- 2012
- 2012
- English.
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In: IEEE Transactions on Nanotechnology. - 1941-0085 .- 1536-125X. ; 11:2, s. 255-260
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Abstract
Subject headings
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- A systematic study of the Cu-catalyzed chemical vapor deposition of graphene under extremely low partial pressure is carried out. A carbon precursor supply of just P-CH4 similar to 0.009 mbar during the deposition favors the formation of large-area uniform monolayer graphene verified by Raman spectra. A diluted HNO3 solution is used to remove Cu before transferring graphene onto SiO2/Si substrates or carbon grids. The graphene can be made suspended over a similar to 12 mu m distance, indicating its good mechanical properties. Electron transport measurements show the graphene sheet resistance of similar to 0.6 k Omega/square at zero gate voltage. The mobilities of electrons and holes are similar to 1800 cm(2)/Vs at 4.2 K and similar to 1200 cm(2)/Vs at room temperature.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- low partial pressure
- wet transfer
- nanoelectronics
- Chemical vapor deposition
- graphene
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Sun, Jie, 1977
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Lindvall, Niclas ...
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Cole, Matthew
-
Angel, Koh
-
Wang, Teng, 1983
-
Teo, Ken
-
show more...
-
Chua, Daniel
-
Liu, Johan, 1960
-
Yurgens, Avgust, ...
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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IEEE Transaction ...
- By the university
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Chalmers University of Technology