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Controllable chemic...
Controllable chemical vapor deposition of large area uniform nanocrystalline graphene directly on silicon dioxide
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- Sun, Jie, 1977 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Lindvall, Niclas, 1985 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Cole, M. T. (författare)
- University Of Cambridge
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visa fler...
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- Wang, Teng, 1983 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Booth, T. J. (författare)
- Danmarks Tekniske Universitet,Technical University of Denmark
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- Boggild, P. (författare)
- Danmarks Tekniske Universitet,Technical University of Denmark
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- Teo, K. B. K. (författare)
- Aixtron Limited
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- Liu, Johan, 1960 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Yurgens, Avgust, 1959 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- AIP Publishing, 2012
- 2012
- Engelska.
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 111:4
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Abstract
Ämnesord
Stäng
- Metal-catalyst-free chemical vapor deposition (CVD) of large area uniform nanocrystalline graphene on oxidized silicon substrates is demonstrated. The material grows slowly, allowing for thickness control down to monolayer graphene. The as-grown thin films are continuous with no observable pinholes, and are smooth and uniform across whole wafers, as inspected by optical-, scanning electron-, and atomic force microscopy. The sp(2) hybridized carbon structure is confirmed by Raman spectroscopy. Room temperature electrical measurements show ohmic behavior (sheet resistance similar to exfoliated graphene) and up to 13% of electric-field effect. The Hall mobility is similar to 40 cm(2)/ Vs, which is an order of magnitude higher than previously reported values for nanocrystalline graphene. Transmission electron microscopy, Raman spectroscopy, and transport measurements indicate a graphene crystalline domain size similar to 10 nm. The absence of transfer to another substrate allows avoidance of wrinkles, holes, and etching residues which are usually detrimental to device performance. This work provides a broader perspective of graphene CVD and shows a viable route toward applications involving transparent electrodes.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- catalytic graphitization
- amorphous-carbon films
- weak-localization
- magnetoresistance
- nanotubes
- raman-spectroscopy
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Sun, Jie, 1977
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Lindvall, Niclas ...
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Cole, M. T.
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Wang, Teng, 1983
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Booth, T. J.
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Boggild, P.
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visa fler...
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Teo, K. B. K.
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Liu, Johan, 1960
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Yurgens, Avgust, ...
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visa färre...
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