Electrostatic feedback for MEMS sensor for in situ TEM instrumentation

• A capacitive force sensor for in situ TEM instrumentation is investigated. In order to prevent movement of the suspended plate in the capacitive sensor force feedback has been investigated, primarily using CV measurements. A manual feedback has successfully been implemented and an analytical model using a serial and a parallel capacitor is presented.

Ämnesord

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Nyckelord

Electrostatic force modeling

Force feedback

Force sensor

Publikations- och innehållstyp

kon (ämneskategori)

ref (ämneskategori)