Search: onr:"swepub:oai:research.chalmers.se:c2f09225-6eb3-4609-992a-2f2871a5f324" >
A study of the dopi...
A study of the doping influence on strain relaxation of graded composition InGaAs layers grown by molecular beam epitaxy
-
- Tångring, Ivar, 1978 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Song, Yuxin, 1981 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Lai, Zonghe, 1948 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
show more...
-
- Wang, Shu Min, 1963 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Sadeghi, Mahdad, 1964 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Larsson, Anders, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
show less...
-
(creator_code:org_t)
- 2009
- 2009
- English.
-
In: Journal of Crystal Growth. - 0022-0248. ; 311, s. 1684-
- Related links:
-
https://research.cha...
Abstract
Subject headings
Close
- We investigate the role of p- and n-type doping in strain relaxation of graded composition InGaAs layers grown by molecular beam epitaxy. It is found that p-type Be-doping can improve material properties, resulting in smaller surface roughness and lower threading dislocation density, while n-type Si-doping has an opposite effect. The effect is strongly dependent on the grading profile, with linear grading showing small differences, while there is a significant difference when an exponential grading is used. Since doping is essential for many types of devices, these results are useful for improving the material properties and performance of metamorphic devices.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Molecular beam epitaxy
- Dislocations
- Semiconducting III–V materials
- Doping
Publication and Content Type
- art (subject category)
- ref (subject category)
Find in a library
To the university's database
- By the author/editor
-
Tångring, Ivar, ...
-
Song, Yuxin, 198 ...
-
Lai, Zonghe, 194 ...
-
Wang, Shu Min, 1 ...
-
Sadeghi, Mahdad, ...
-
Larsson, Anders, ...
- About the subject
-
- ENGINEERING AND TECHNOLOGY
-
ENGINEERING AND ...
-
and Materials Engine ...
-
- NATURAL SCIENCES
-
NATURAL SCIENCES
-
and Physical Science ...
- Articles in the publication
-
Journal of Cryst ...
- By the university
-
Chalmers University of Technology