A NEXAFS and XPS study of oxygen doped Cu3N

• Thin films of pure and oxygen doped Cu3N, deposited by Chemical Vapour Deposition, have been studied with the NEXAFS technique both in the FLY and TEY mode and compared with XPS results.  Cu, CuO and Cu2O have been used as reference samples in the investigation for detection of surface oxidation and contaminants. The aim has been to investigate how and if the chemical environment changes around Cu, N and O upon incorporation of oxygen in the Cu3N lattice. The recorded NEXAFS spectra are discussed in terms of valence electrons, crystal structure and local bonding environment. It was found that basically two oxygen absorption sites are possible in the crystal structure, (½, ½, 0) and (¼, ¼, ¼), and that the oxygen distribution between the two sites is probably given by the oxygen concentration.

Ämnesord

NATURVETENSKAP  -- Kemi -- Oorganisk kemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)

Nyckelord

Copper nitride

oxygen doping

NEXAFS

XPS and doping sites

Inorganic chemistry

Oorganisk kemi

Inorganic Chemistry

oorganisk kemi

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