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TiO2 membrane high-...
TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
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- Hashemi, Seyed Ehsan, 1986 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bengtsson, Jörgen, 1968 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Gustavsson, Johan, 1974 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- CARLSSON, STEFAN, 1987 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Rossbach, Georg (författare)
- Ecole Polytechnique Federale de Lausanne (EPFL),Swiss Federal Institute of Technology in Lausanne (EPFL)
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- Haglund, Åsa, 1976 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- American Vacuum Society, 2015
- 2015
- Engelska.
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Ingår i: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. - : American Vacuum Society. - 2166-2746 .- 2166-2754. ; 33:5
- Relaterad länk:
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http://dx.doi.org/10...
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https://research.cha... (primary) (free)
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https://avs.scitatio...
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https://doi.org/10.1...
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https://research.cha...
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Abstract
Ämnesord
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- © 2015 American Vacuum Society. In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO2, with SiO2 as a sacrificial layer. The TiO2 film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
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