UV-SLPT for gas sensor research on MISiC devices

• A modified Scanning Light Pulse Technique (SLPT) setup that can be used to evaluate SiC-based gas-sensitive field-effect devices is introduced. This is exemplified with measurements on a Pt-MISiC capacitor that has a metal thickness gradient. The device shows large responses to hydrogen and ammonia in air. The H-2 and NH3 responses show a complementary dependence on the Pt film thickness at 140 degrees C. The temperature dependence differs however for the two gases. The measurement setup uses UV transparent optics together with mechanical chopping of light from a short wavelength light source. The spatial resolution of the system is found to be approximately 50 mu m.

Nyckelord

ammonia

gas sensors

hydrogen

MISiC

platinum

Pt

scanning light pulse technique

silicon carbide

SLPT

UV-SLPT

wide band gap semiconductor

TECHNOLOGY

TEKNIKVETENSKAP

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