WFRF:(Carlberg Patrick)
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Nanoimprint in PDMS on glass with two-level hybrid stamp
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- Carlberg, Patrick (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Montelius, Lars (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Tegenfeldt, Jonas (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
- (creator_code:org_t)
- Elsevier BV, 2008
- 2008
- English.
- In: Microelectronic Engineering. - : Elsevier BV. - 1873-5568 .- 0167-9317. ; 85:1, s. 210-213
- Journal article (peer-reviewed)
Subject headings
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Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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- Microelectronic Engineering (Search for host publication in LIBRIS)
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