High efficiency nonuniform grating coupler by utilizing the lag effect in the dry etching process

• Utilizing the lag effect in dry etching, a nonuniform silicon-on-insulator grating coupler is designed and fabricated. Over 80% (>-1dB) coupling efficiency is theoretically obtained and experimental coupling efficiency of 55% is achieved for TE polarization.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Dry etching

Efficiency

Optical fiber fabrication

Optical fibers

Silicon on insulator technology

Coupling efficiency

Dry etching process

Grating couplers

High-efficiency

Lag effects

Nonuniform gratings

TE polarizations

Optical fiber communication

Electrical engineering, electronics and photonics

Publikations- och innehållstyp

ref (ämneskategori)

kon (ämneskategori)