1. |
- Griss, Patrik, et al.
(författare)
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Liquid handling using expandable microspheres
- 2002
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Ingår i: Proceedings of FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS. - : IEEE. - 0780371852 ; , s. 117-120
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Konferensbidrag (refereegranskat)abstract
- In this study we introduce two novel concepts for fluid handling in microfluidic systems and show their realization in micromachined test structures: a one-shot micropump and a normally open one-shot valve. Both principles use Expancel((R)) microspheres. which are small spherical plastic particles that, A hen heated, increase their volume by a factor of about 60, The expansion is irreversible, i.e. when cooled again, the expandable microspheres do not shrink.
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2. |
- Griss, Patrick, et al.
(författare)
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Novel, side opened out-of-plane microneedles for microfluidic transdermal interfacing
- 2002
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Ingår i: FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS. - New York : IEEE. - 0780371852 ; , s. 467-470
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Konferensbidrag (refereegranskat)abstract
- We present the first hollow out of wafer plane silicon microneedles that have openings in the shaft rather than having an orifice at the tip. These structures are suited for transdermal microfluidic applications, e.g. drug- or vaccine delivery. The developed deep reactive ion etching (DRIE) process allows fabrication of two dimensional, mechanically highly resistant needle arrays offering low resistance to liquid flows and offering a large exposure area between the fluid and the tissue. The presented process does not require much wafer handling and only two photolithography steps are needed. Using this chip in a typical application, e.g. vaccine delivery, a 100 mul volume of aqueous fluid injected through a chip of 30 mm(2) in 2s would cause a pressure drop of less than 2kPa. The presented needles are approximately 2 10 pm long.
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3. |
- Haasl, Sjoerd, et al.
(författare)
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Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurements
- 2002
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Ingår i: FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS. - : IEEE. - 0780371852 ; , s. 336-339
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Konferensbidrag (refereegranskat)abstract
- We present the first micromachined metal hot-wire anemometer sensor for use in near-wall turbulence measurements. To measure close to the surface without the circuitry interfering with the flow, a novel hybrid assembly of the sensor has been developed. We present the design, fabrication and characteristics of this sensor.
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