| 1. |
- Banuazizi, S. Amir Hossein, et al.
(författare)
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Magnetic force microscopy of an operational spin nano-oscillator
- 2022
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Ingår i: Microsystems & Nanoengineering. - : Springer Science and Business Media LLC. - 2055-7434. ; 8:1
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Tidskriftsartikel (refereegranskat)abstract
- Magnetic force microscopy (MFM) is a powerful technique for studying magnetic microstructures and nanostructures that relies on force detection by a cantilever with a magnetic tip. The detected magnetic tip interactions are used to reconstruct the magnetic structure of the sample surface. Here, we demonstrate a new method using MFM for probing the spatial profile of an operational nanoscale spintronic device, the spin Hall nano-oscillator (SHNO), which generates high-intensity spin wave auto-oscillations enabling novel microwave applications in magnonics and neuromorphic computing. We developed an MFM system by adding a microwave probe station to allow electrical and microwave characterization up to 40 GHz during the MFM process. SHNOs-based on NiFe/Pt bilayers with a specific design compatible with the developed system-were fabricated and scanned using a Co magnetic force microscopy tip with 10 nm spatial MFM resolution, while a DC current sufficient to induce auto-oscillation flowed. Our results show that this developed method provides a promising path for the characterization and nanoscale magnetic field imaging of operational nano-oscillators.
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| 2. |
- Dubois, Valentin J., et al.
(författare)
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Design and fabrication of crack-junctions
- 2017
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Ingår i: MICROSYSTEMS & NANOENGINEERING. - : NATURE PUBLISHING GROUP. - 2055-7434. ; 3
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Tidskriftsartikel (refereegranskat)abstract
- Nanogap electrodes consist of pairs of electrically conducting tips that exhibit nanoscale gaps. They are building blocks for a variety of applications in quantum electronics, nanophotonics, plasmonics, nanopore sequencing, molecular electronics, and molecular sensing. Crack-junctions (CJs) constitute a new class of nanogap electrodes that are formed by controlled fracture of suspended bridge structures fabricated in an electrically conducting thin film under residual tensile stress. Key advantages of the CJ methodology over alternative technologies are that CJs can be fabricated with wafer-scale processes, and that the width of each individual nanogap can be precisely controlled in a range from <2 to >100 nm. While the realization of CJs has been demonstrated in initial experiments, the impact of the different design parameters on the resulting CJs has not yet been studied. Here we investigate the influence of design parameters such as the dimensions and shape of the notches, the length of the electrode-bridge and the design of the anchors, on the formation and propagation of cracks and on the resulting features of the CJs. We verify that the design criteria yields accurate prediction of crack formation in electrode-bridges featuring a beam width of 280 nm and beam lengths ranging from 1 to 1.8 mu m. We further present design as well as experimental guidelines for the fabrication of CJs and propose an approach to initiate crack formation after release etching of the suspended electrode-bridge, thereby enabling the realization of CJs with pristine electrode surfaces.
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| 3. |
- Fan, Xuge, et al.
(författare)
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Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
- 2020
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Ingår i: MICROSYSTEMS & NANOENGINEERING. - : NATURE PUBLISHING GROUP. - 2055-7434. ; 6:1
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Tidskriftsartikel (refereegranskat)abstract
- Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 mu m to 110 mu m, and suspended proof masses consisting of solid silicon cubes that are from 5 mu mx5 mu mx16.4 mu m to 100 mu mx100 mu mx16.4 mu m in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were >90%, with >70% of the graphene membranes having >90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust, and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to 7000nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.
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| 4. |
- Fischer, Andreas C., 1982-, et al.
(författare)
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Integrating MEMS and ICs
- 2015
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Ingår i: Microsystems & Nanoengineering. - : Springer Science and Business Media LLC. - 2055-7434. ; 1:1, s. 1-16
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Recension (refereegranskat)abstract
- The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sense or control physical, optical or chemical quantities, ICs typically provide functionalities related to the signals of these transducers, such as analog-to-digital conversion, amplification, filtering and information processing as well as communication between the MEMS transducer and the outside world. Thus, the vast majority of commercial MEMS products, such as accelerometers, gyroscopes and micro-mirror arrays, are integrated and packaged together with ICs. There are a variety of possible methods of integrating and packaging MEMS and IC components, and the technology of choice strongly depends on the device, the field of application and the commercial requirements. In this review paper, traditional as well as innovative and emerging approaches to MEMS and IC integration are reviewed. These include approaches based on the hybrid integration of multiple chips (multi-chip solutions) as well as system-on-chip solutions based on wafer-level monolithic integration and heterogeneous integration techniques. These are important technological building blocks for the ‘More-Than-Moore’ paradigm described in the International Technology Roadmap for Semiconductors. In this paper, the various approaches are categorized in a coherent manner, their merits are discussed, and suitable application areas and implementations are critically investigated. The implications of the different MEMS and IC integration approaches for packaging, testing and final system costs are reviewed.
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| 5. |
- Guo, Maoxiang, et al.
(författare)
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Efficient DNA-assisted synthesis of trans-membrane gold nanowires
- 2018
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Ingår i: microsystems and nanoengineering. - : Springer Science and Business Media LLC. - 2055-7434. ; 4
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Tidskriftsartikel (refereegranskat)abstract
- Whereas electric circuits and surface-based (bio) chemical sensors are mostly constructed in-plane due to ease of manufacturing, 3D microscale and nanoscale structures allow denser integration of electronic components and improved mass transport of the analyte to (bio) chemical sensor surfaces. This work reports the first out-of-plane metallic nanowire formation based on stretching of DNA through a porous membrane. We use rolling circle amplification (RCA) to generate long single-stranded DNA concatemers with one end anchored to the surface. The DNA strands are stretched through the pores in the membrane during liquid removal by forced convection. Because the liquid-air interface movement across the membrane occurs in every pore, DNA stretching across the membrane is highly efficient. The stretched DNA molecules are transformed into trans-membrane gold nanowires through gold nanoparticle hybridization and gold enhancement chemistry. A 50 fM oligonucleotide concentration, a value two orders of magnitude lower than previously reported for flat surface-based nanowire formation, was sufficient for nanowire formation. We observed nanowires in up to 2.7% of the membrane pores, leading to an across-membrane electrical conductivity reduction from open circuit to <20 Omega. The simple electrical read-out offers a high signal-to-noise ratio and can also be extended for use as a biosensor due to the high specificity and scope for multiplexing offered by RCA.
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| 6. |
- Guo, Weijin, 1989-, et al.
(författare)
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Capillary pumping independent of the liquid surface energy and viscosity
- 2018
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Ingår i: Microsystems & Nanoengineering. - : Springer Nature. - 2055-7434. ; 4:2
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Tidskriftsartikel (refereegranskat)abstract
- Capillary pumping is an attractive means of liquid actuation because it is a passive mechanism, i.e., it does not rely on an external energy supply during operation. The capillary flow rate generally depends on the liquid sample viscosity and surface energy. This poses a problem for capillary-driven systems that rely on a predictable flow rate and for which the sample viscosity or surface energy are not precisely known. Here, we introduce the capillary pumping of sample liquids with a flow rate that is constant in time and independent of the sample viscosity and sample surface energy. These features are enabled by a design in which a well-characterized pump liquid is capillarily imbibed into the downstream section of the pump and thereby pulls the unknown sample liquid into the upstream pump section. The downstream pump geometry is designed to exert a Laplace pressure and fluidic resistance that are substantially larger than those exerted by the upstream pump geometry on the sample liquid. Hence, the influence of the unknown sample liquid on the flow rate is negligible. We experimentally tested pumps of the new design with a variety of sample liquids, including water, different samples of whole blood, different samples of urine, isopropanol, mineral oil, and glycerol. The capillary filling speeds of these liquids vary by more than a factor 1000 when imbibed to a standard constant cross-section glass capillary. In our new pump design, 20 filling tests involving these liquid samples with vastly different properties resulted in a constant volumetric flow rate in the range of 20.96–24.76 μL/min. We expect this novel capillary design to have immediate applications in lab-on-a-chip systems and diagnostic devices.
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| 7. |
- Karlsson, J. Mikael, et al.
(författare)
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Off-Stoichiometry Improves Photostructuring of Thiol-Enes Through Diffusion-Induced Monomer Depletion
- 2016
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Ingår i: Microsystems and Nanoengineering. - : Nature Publishing Group. - 2055-7434. ; 2
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Tidskriftsartikel (refereegranskat)abstract
- Thiol-enes are a group of alternating copolymers with highly ordered networks used in a wide range of applications. Here, “click” chemistry photostructuring in off-stoichiometric thiol-enes is shown to induce microscale polymeric compositional gradients due to species diffusion between non-illuminated and illuminated regions, creating two narrow zones with distinct composition on either side of the photomask feature boundary: a densely cross-linked zone in the illuminated region and a zone with an unpolymerized highly off-stoichiometric monomer composition in the non-illuminated region. By the use of confocal Raman microscopy, it is here explained how species diffusion causes such intricate compositional gradients in the polymer, and how off-stoichiometry results in improved image transfer accuracy in thiol-ene photostructuring. Furthermore, increasing the functional group off-stoichiometry and decreasing photomask feature size is shown to amplify the induced gradients, which potentially leads to a new methodology for microstructuring.
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| 8. |
- Kaya, Kerem, et al.
(författare)
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Soft metamaterial with programmable ferromagnetism
- 2022
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Ingår i: Microsystems & Nanoengineering. - : Springer Nature. - 2055-7434. ; 8:1
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Tidskriftsartikel (refereegranskat)abstract
- Magnetopolymers are of interest in smart material applications; however, changing their magnetic properties post synthesis is complicated. In this study, we introduce easily programmable polymer magnetic composites comprising 2D lattices of droplets of solid-liquid phase change material, with each droplet containing a single magnetic dipole particle. These composites are ferromagnetic with a Curie temperature defined by the rotational freedom of the particles above the droplet melting point. We demonstrate magnetopolymers combining high remanence characteristics with Curie temperatures below the composite degradation temperature. We easily reprogram the material between four states: (1) a superparamagnetic state above the melting point which, in the absence of an external magnetic field, spontaneously collapses to; (2) an artificial spin ice state, which after cooling forms either; (3) a spin glass state with low bulk remanence, or; (4) a ferromagnetic state with high bulk remanence when cooled in the presence of an external magnetic field. We observe the spontaneous emergence of 2D magnetic vortices in the spin ice and elucidate the correlation of these vortex structures with the external bulk remanence. We also demonstrate the easy programming of magnetically latching structures.
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| 9. |
- Khorramdel, Behnam, et al.
(författare)
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Inkjet printing technology for increasing the I/O density of 3D TSV interposers
- 2017
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Ingår i: Microsystems & Nanoengineering. - : Nature Publishing Group. - 2055-7434. ; 3, s. 17002-
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Tidskriftsartikel (refereegranskat)abstract
- Interposers with through-silicon vias (TSVs) play a key role in the three-dimensional integration and packaging of integrated circuits and microelectromechanical systems. In the current practice of fabricating interposers, solder balls are placed next to the vias; however, this approach requires a large foot print for the input/output (I/O) connections. Therefore, in this study, we investigate the possibility of placing the solder balls directly on top of the vias, thereby enabling a smaller pitch between the solder balls and an increased density of the I/O connections. To reach this goal, inkjet printing (that is, piezo and super inkjet) was used to successfully fill and planarize hollow metal TSVs with a dielectric polymer. The under bump metallization (UBM) pads were also successfully printed with inkjet technology on top of the polymer-filled vias, using either Ag or Au inks. The reliability of the TSV interposers was investigated by a temperature cycling stress test (-40 °C to +125 °C). The stress test showed no impact on DC resistance of the TSVs; however, shrinkage and delamination of the polymer was observed, along with some micro-cracks in the UBM pads. For proof of concept, SnAgCu-based solder balls were jetted on the UBM pads.
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| 10. |
- Lucchetti, Mara, et al.
(författare)
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Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system
- 2024
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Ingår i: MICROSYSTEMS & NANOENGINEERING. - : SPRINGERNATURE. - 2055-7434. ; 10:1
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Tidskriftsartikel (refereegranskat)abstract
- In healthy individuals, the intestinal epithelium forms a tight barrier to prevent gut bacteria from reaching blood circulation. To study the effect of probiotics, dietary compounds and drugs on gut barrier formation and disruption, human gut epithelial and bacterial cells can be cocultured in an in vitro model called the human microbial crosstalk (HuMiX) gut-on-a-chip system. Here, we present the design, fabrication and integration of thin-film electrodes into the HuMiX platform to measure transepithelial electrical resistance (TEER) as a direct readout on barrier tightness in real-time. As various aspects of the HuMiX platform have already been set in their design, such as multiple compressible layers, uneven surfaces and nontransparent materials, a novel fabrication method was developed whereby thin-film metal electrodes were first deposited on flexible substrates and sequentially integrated with the HuMiX system via a transfer-tape approach. Moreover, to measure localized TEER along the cell culture chamber, we integrated multiple electrodes that were connected to an impedance analyzer via a multiplexer. We further developed a dynamic normalization method because the active measurement area depends on the measured TEER levels. The fabrication process and system setup can be applicable to other barrier-on-chip systems. As a proof-of-concept, we measured the barrier formation of a cancerous Caco-2 cell line in real-time, which was mapped at four spatially separated positions along the HuMiX culture area.
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