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Search: L773:9781467321983

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1.
  • Fischer, Andreas C., et al. (author)
  • Layer-by-layer 3D printing of Si micro- and nanostructures by Si deposition, ion implantation and selective Si etching
  • 2012
  • In: 12th IEEE Conference on Nanotechnology (IEEE-NANO), 2012. - : IEEE conference proceedings. - 9781467321983 ; , s. 1-4
  • Conference paper (peer-reviewed)abstract
    • In this paper we report a method for layer-by-layer printing of three-dimensional (3D) silicon (Si) micro- and nanostructures. This fabrication method is based on a sequence of alternating steps of chemical vapor deposition of Si and local implantation of gallium (Ga+) ions by focused ion beam (FIB) writing. The defined 3D structures are formed in a final step by selectively wet etching the non-implanted Si in potassium hydroxide (KOH). We demonstrate the viability of the method by fabricating 2 and 3-layer 3D Si structures, including suspended beams and patterned lines with dimensions on the nm-scale.
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2.
  • Panchal, V., et al. (author)
  • Surface potential variations in epitaxial graphene devices investigated by Electrostatic Force Spectroscopy
  • 2012
  • In: Proceedings of the IEEE Conference on Nanotechnology. - : IEEE. - 1944-9399 .- 1944-9380. - 9781467321983
  • Conference paper (peer-reviewed)abstract
    • Electrostatic Force Spectroscopy and Scanning Kelvin Probe Microscopy techniques are used to study the performance of side-gated Hall devices made of epitaxial graphene on 4H-SiC(0001). Electrostatic Force Spectroscopy is a novel method which allows quantitative surface potential measurements with high spatial resolution. Using these techniques, we calibrate work function of the metal coated tip and define the work functions for single and double-layer graphene. We also show that the use of moderate strength electrical fields in the side-gate geometry does not notably change the performance of the device.
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3.
  • Wang, Nan, 1988, et al. (author)
  • Reliability investigation of nano-enhanced thermal conductive adhesives
  • 2012
  • In: Proceedings of the IEEE Conference on Nanotechnology. - 1944-9399 .- 1944-9380. - 9781467321983
  • Conference paper (peer-reviewed)abstract
    • This paper deals with silver (Ag) coated silicon carbide nanoparticles (SiC@Ag NPs) for thermal conductive interconnect and die attach applications.
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  • Result 1-3 of 3

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