| 1. |
- Guo, Weijin, 1989-, et al.
(författare)
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Capillary pumping with a constant flow rate independent of the liquid sample viscosity and surface energy
- 2017
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Ingår i: Proceeding of 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). - : IEEE. - 9781509050789
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Konferensbidrag (refereegranskat)abstract
- We introduce and experimentally verify a capillary pump design that, for the first time, enables autonomous pumping of sample liquid with a flow rate constant in time and independent of the sample viscosity and sample surface energy. These results are of interest for applications that rely on a predictable flow rate and where the sample fluid viscosity or surface energy are not precisely known, e.g. in capillary driven diagnostic lateral flow biosensors for urine or blood sample, where large variations exist in both viscosity and surface energy between different patient samples.
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| 2. |
- Laakso, Miku, 1989-, et al.
(författare)
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Maskless Manufacturing of Through Glass Vias (TGVs) and Their Test Structures
- 2017
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Ingår i: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - 9781509050789 ; , s. 753-756
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Konferensbidrag (refereegranskat)abstract
- Through glass vias (TGVs) are a key component in glass-based interposers and microelectromechanical-system lid wafers. Magnetic-field-assisted self-assembly has been demonstrated earlier in fabrication of through silicon vias. Here we present an entirely maskless TGV fabrication process utilizing magnetic assembly. Femtosecond laser is used for ablative direct patterning of surface metal layers and for exposing the TGV conductors after wafer thinning. The proposed TGV structure is shown to be electrically functional by measuring the TGV resistance values.
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| 3. |
- Rahiminejad, Sofia, 1987, et al.
(författare)
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Rapid manufacturing of OSTE polymer RF-MEMS components
- 2017
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Ingår i: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - : IEEE. - 1084-6999. - 9781509050789 ; , s. 901-904
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Konferensbidrag (refereegranskat)abstract
- This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor.
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