| 1. |
- Bogaerts, Wim, et al.
(författare)
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Programmable silicon photonic circuits powered by MEMS
- 2022
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE-Intl Soc Optical Eng.
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Konferensbidrag (refereegranskat)abstract
- We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.
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| 2. |
- Bogaerts, Wim, et al.
(författare)
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Scaling programmable silicon photonics circuits
- 2023
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Ingår i: Silicon Photonics XVIII. - : SPIE-Intl Soc Optical Eng.
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Konferensbidrag (refereegranskat)abstract
- We give an overview the progress of our work in silicon photonic programmable circuits, covering the techn stack from the photonic chip over the driver electronics, packaging technologies all the way to the sof layers. On the photonic side, we show our recent results in large-scale silicon photonic circuits with diff tuning technologies, including heaters, MEMS and liquid crystals, and their respective electronic driving sch We look into the scaling potential of these different technologies as the number of tunable elements in a ci increases. Finally, we elaborate on the software routines for routing and filter synthesis to enable the pho programmer.
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| 3. |
- Edinger, Pierre, et al.
(författare)
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A Bistable Silicon Photonic Mems Phase Switch For Nonvolatile Photonic Circuits
- 2022
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Konferensbidrag (refereegranskat)abstract
- Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS π-phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.
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| 4. |
- Edinger, Pierre, et al.
(författare)
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A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits
- 2023
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Ingår i: Integrated Photonics Research, Silicon and Nanophotonics in Proceedings Advanced Photonics Congress 2023 - Part of Advanced Photonics Congress 2023. - : Optica Publishing Group.
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Konferensbidrag (refereegranskat)abstract
- Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.
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| 5. |
- Edinger, Pierre, et al.
(författare)
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A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling and phase
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Annan publikation (övrigt vetenskapligt/konstnärligt)abstract
- Ring resonators are a vital element for designing filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption and good optical performance are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of coupling and round-trip phase using low-power microelectromechanical (MEMS) actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable long-term operation with low damping. On resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4V and a peak drive amplitude as low as 20mV.
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| 6. |
- Edinger, Pierre, et al.
(författare)
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Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling
- 2022
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Ingår i: 2022 Conference on Lasers and Electro-Optics, CLEO 2022. - : Institute of Electrical and Electronics Engineers Inc..
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Konferensbidrag (refereegranskat)abstract
- Applications of silicon photonics range from sensing to microwave processing. However, low-power active filters with long FSRs are lacking. We demonstrate an add-drop ring filter with 4 nm FSR and nW-level MEMS tuning of phase and coupling.
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| 7. |
- Edinger, Pierre, et al.
(författare)
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An Integrated Platform for Cavity Optomechanics with Vacuum-Sealed Silicon Photonic MEMS
- 2023
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Ingår i: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. - : Institute of Electrical and Electronics Engineers Inc.. ; , s. 425-428
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Konferensbidrag (refereegranskat)abstract
- Silicon photonics is an excellent platform for integrated cavity optomechanics due to silicon's high light confinement and favorable mechanical properties. However, optomechanical devices require a vacuum environment to inhibit damping due to air.We present an integrated platform for cavity optomechanics using thermo-compression bonding of silicon caps to provide on-chip vacuum sealing. We demonstrate optomechanical coupling in a vacuum-sealed ring resonator implemented on the platform, either by modulation of the laser power or by using an electrostatic phase shifter in the ring.By enabling optomechanics on a standard platform, we aim to make the technology available to a wider user base.
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| 8. |
- Edinger, Pierre, et al.
(författare)
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Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
- 2023
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Ingår i: Optics Express. - : Optica Publishing Group. - 1094-4087. ; 31:4, s. 6540-6551
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Tidskriftsartikel (refereegranskat)abstract
- Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.
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| 9. |
- Khan, Umar, et al.
(författare)
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Low power actuators for programmable photonic processors
- 2023
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Ingår i: AI and Optical Data Sciences IV. - : SPIE-Intl Soc Optical Eng.
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Konferensbidrag (refereegranskat)abstract
- The demand for efficient actuators in photonics has peaked with increasing popularity for large-scale general-purpose programmable photonics circuits. We present our work to enhance an established silicon photonics platform with low-power micro-electromechanical (MEMS) and liquid crystal (LC) actuators to enable large-scale programmable photonic integrated circuits (PICs).
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| 10. |
- Khan, Umar, et al.
(författare)
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MORPHIC : MEMS enhanced silicon photonics for programmable photonics
- 2022
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Ingår i: Integrated Photonics Platforms Ii. - : SPIE-Intl Soc Optical Eng.
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Konferensbidrag (refereegranskat)abstract
- We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs).
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