| 1. |
- Bakhit, Babak, 1983-, et al.
(författare)
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Age hardening in superhard ZrB2-rich Zr1-xTaxBy thin films
- 2021
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Ingår i: Scripta Materialia. - : Elsevier. - 1359-6462 .- 1872-8456. ; 191, s. 120-125
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Tidskriftsartikel (refereegranskat)abstract
- We recently showed that sputter-deposited Zr1-xTaxBy thin films have hexagonal AlB2-type columnar nanostructure in which column boundaries are B-rich for x < 0.2, while Ta-rich for x ≥ 0.2. As-deposited layers with x ≥ 0.2 exhibit higher hardness and, simultaneously, enhanced toughness. Here, we study the mechanical properties of ZrB2.4, Zr0.8Ta0.2B1.8, and Zr0.7Ta0.3B1.5 films annealed in Ar atmosphere as a function of annealing temperature Ta up to 1200 °C. In-situ and ex-situ nanoindentation analyses reveal that all films undergo age hardening up to Ta = 800 °C, with the highest hardness achieved for Zr0.8Ta0.2B1.8 (45.5±1.0 GPa). The age hardening, which occurs without any phase separation or decomposition, can be explained by point-defect recovery that enhances chemical bond density. Although hardness decreases at Ta > 800 °C due mainly to recrystallization, column coarsening, and planar defect annihilation, all layers show hardness values above 34 GPa over the entire Ta range.
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| 2. |
- Bakhit, Babak, et al.
(författare)
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Controlling the B/Ti ratio of TiBx thin films grown by high-power impulse magnetron sputtering
- 2018
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 36:3
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Tidskriftsartikel (refereegranskat)abstract
- TiBx thin films grown from compound TiB2 targets by magnetron sputter deposition are typically highly over-stoichiometric, with x ranging from 3.5 to 2.4, due to differences in Ti and B preferential-ejection angles and gas-phase scattering during transport from the target to the substrate. Here, the authors demonstrate that stoichiometric TiB2 films can be obtained using highpower impulse magnetron sputtering (HiPIMS) operated in power-controlled mode. The B/Ti ratio x of films sputter-deposited in Ar is controllably varied from 2.08 to 1.83 by adjusting the length of HiPIMS pulses t(on) between 100 and 30 mu s, while maintaining average power and pulse frequency constant. This results in peak current densities J(T), peak ranging from 0.27 to 0.88 A/cm(2). Energy- and time-resolved mass spectrometry analyses of the ion fluxes incident at the substrate position show that the density of metal ions increases with decreasing t(on) due to a dramatic increase in J(T, peak) resulting in the strong gas rarefaction. With t(on)amp;lt;60 mu s (J(T),(peak)amp;gt; 0.4 A/cm(2)), film growth is increasingly controlled by ions incident at the substrate, rather than neutrals, as a result of the higher plasma dencity and, hence, electron-impact ionization probablity. Thus, since sputter- ejected Ti atoms have a higher probability of being ionized than B atoms, due to their lower first-ionization potential and larger ionization cross-section, the Ti concentration in as-deposited films increases with decreasing ton (increasing J(T,peak)) as ionized sputtered species are steered to the substrate by the plasma in order to maintain charge neutrality. Published by the AVS.
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| 3. |
- Bakhit, Babak, 1983-, et al.
(författare)
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Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
- 2021
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Ingår i: Vacuum. - : Elsevier. - 0042-207X .- 1879-2715. ; 186
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Tidskriftsartikel (refereegranskat)abstract
- There is a need for developing synthesis techniques that allow the growth of high-quality functional films at low substrate temperatures to minimize energy consumption and enable coating temperature-sensitive substrates. A typical shortcoming of conventional low-temperature growth strategies is insufficient atomic mobility, which leads to porous microstructures with impurity incorporation due to atmosphere exposure, and, in turn, poor mechanical properties. Here, we report the synthesis of dense Ti0.67Hf0.33B1.7 thin films with a hardness of ∼41.0 GPa grown without external heating (substrate temperature below ∼100 °C) by hybrid high-power impulse and dc magnetron co-sputtering (HfB2-HiPIMS/TiB2-DCMS) in pure Ar on Al2O3(0001) substrates. A substrate bias potential of −300 V is synchronized to the target-ion-rich portion of each HiPIMS pulse. The limited atomic mobility inherent to such desired low-temperature deposition is compensated for by heavy-mass ion (Hf+) irradiation promoting the growth of dense Ti0.67Hf0.33B1.7.
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| 4. |
- Bakhit, Babak, et al.
(författare)
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Improving the high-temperature oxidation resistance of TiB2 thin films by alloying with Al
- 2020
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Ingår i: Acta Materialia. - : PERGAMON-ELSEVIER SCIENCE LTD. - 1359-6454 .- 1873-2453. ; 196, s. 677-689
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Tidskriftsartikel (refereegranskat)abstract
- Refractory transition-metal diborides (TMB2) are candidates for extreme environments due to melting points above 3000 degrees C, excellent hardness, good chemical stability, and thermal and electrical conductivity. However, they typically suffer from rapid high-temperature oxidation. Here, we study the effect of Al addition on the oxidation properties of sputter-deposited TiB2-rich Ti1-xAlxBy thin films and demonstrate that alloying the films with Al significantly increases the oxidation resistance with a slight decrease in hardness. TiB2.4 layers are deposited by dc magnetron sputtering (DCMS) from a TiB2 target, while Ti1-xAlxBy alloy films are grown by hybrid high-power impulse and dc magnetron co-sputtering (Al-HiPIMS/TiB2-DCMS). All as-deposited films exhibit columnar structure. The column boundaries of TiB2.4 are B-rich, while Ti0.68Al0.32B1.35 alloys have Ti-rich columns surrounded by a Ti(1-x)Al(x)By tissue phase which is predominantly Al rich. Air-annealing TiB2.4 at temperatures above 500 degrees C leads to the formation of oxide scales that do not contain B and mostly consist of a rutile-TiO2 (s) phase. The resulting oxidation products are highly porous due to the evaporation of B2O3 (g) phase as well as the coarsening of TiO2 crystallites. This poor oxidation resistance is significantly improved by alloying with Al. While air-annealing at 800 degrees C for 0.5 h results in the formation of an similar to 1900-nm oxide scale on TiB2.4, the thickness of the scale formed on the Ti0.68Al0.32B1.35 alloys is similar to 470 nm. The enhanced oxidation resistance is attributed to the formation of a dense, protective Al-containing oxide scale that considerably decreases the oxygen diffusion rate by suppressing the oxide-crystallites coarsening. (C) 2020 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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| 5. |
- Bakhit, Babak, et al.
(författare)
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Microstructure, mechanical, and corrosion properties of Zr1-xCrxBy diboride alloy thin films grown by hybrid high power impulse/DC magnetron co-sputtering
- 2022
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Ingår i: Applied Surface Science. - : Elsevier. - 0169-4332 .- 1873-5584. ; 591
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Tidskriftsartikel (refereegranskat)abstract
- We study microstructure, mechanical, and corrosion properties of Zr1-xCrxBy coatings deposited by hybrid high power impulse/DC magnetron co-sputtering (CrB2-HiPIMS/ZrB2-DCMS). Cr/(Zr + Cr) ratio, x, increases from 0.13 to 0.9, while B/(Zr + Cr) ratio, y, decreases from 2.92 to 1.81. As reference, ZrB2.18 and CrB1.81 layers are grown at 4000 W DCMS. ZrB2.18 and CrB1.81 columns are continual from near substrate toward the surface with open column boundaries. We find that the critical growth parameter to achieve dense films is the ratio of Cr+- dominated ion flux and the (Zr + B) neutral flux from the ZrB2 target. Thus, the alloys are categorized in two groups: films with x < 0.32 (low Cr+/(Zr + B) ratios) that have continuous columnar growth, rough surfaces, and open column boundaries, and films with x >= 0.32 (high Cr+/(Zr + B) ratios) that Cr+-dominated ion fluxes are sufficient to interrupt continuous columns, resulting in smooth surface and dense fine-grain microstructure. The pulsed metal-ion irradiation is more effective in film densification than continuous Ar+ bombardment. Dense Zr0.46Cr0.54B2.40 and Zr0.10Cr0.90B1.81 alloys are hard (> 30 GPa) and almost stress-free with relative nano indentation toughness of 1.3 MPa root m and 2.3 MPa root m, respectively, and remarkedly low corrosion rates (~& nbsp;1.0 x 10(-6) mA/cm(2) for Zr0.46Cr0.54B2.40 and~& nbsp; 2.1 x 10(-6) mA/cm(2) for Zr0.10Cr0.90B1.81).
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| 6. |
- Bakhit, Babak, 1983-
(författare)
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Multifunctional Transition-metal Diboride Coatings Synthesized by Magnetron sputtering with Synchronized Metal-ion Irradiation
- 2020
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- Refractory transition-metal diborides (TMB2), classified as ultra-high temperature ceramics, are promising materials for extreme thermal and chemical environments. There is a growing demand for employing TMB2 in high-temperature electrodes, advanced nuclear fission reactors, molten metal containment, refractory crucibles, thermocouple protection tubes in steel baths and aluminum reduction cells, reinforcement fibers, solar power, aerospace, and armor applications. Magnetron-sputter-deposited TMB2 have recently received increasing attention as the next class of hard ceramic protective thin films. These layers usually crystallize in a hexagonal AlB2 crystal structure (P6/mmm, SG-191) in which B atoms form graphite-like honeycomb sheets between hexagonal-close-packed TM layers. The strong covalent bonding between TM and B atoms as well as within the honeycomb B sheets provides high melting temperature, hardness, and stiffness, while metallic bonding within TM layers results in good electrical and thermal conductivities. However, sputter-deposited TMB2 films suffer from several critical issues such as boron overstoichiometry, high brittleness, and low oxidation resistance. All of these aspects are addressed in the thesis.In Paper 1, the common issue with sputter-deposited diboride thin films, i.e. the presence of excess B, is resolved by using high power impulse magnetron sputtering (HiPIMS). The B/Ti ratio in TiBx films, used as a model materials system, is controllably varied from 2.08 to 1.83 by adjusting the HiPIMS pulse length ton, while maintaining the average power and pulse frequency constant. As a result, the peak current density increases from 0.27 to 0.88 A/cm2, which leads to an increased gas rarefaction and, hence, higher metal-ion densities in the plasma. Film growth becomes then increasingly controlled by ionized target atoms, rather than neutral species. Since sputter-ejected Ti atoms have a higher probability of being ionized than B atoms, due to their lower first-ionization potential and larger ionization cross-section, the B/Ti ratio in the films decreases a function of target peak current.While TM diborides are inherently hard, that alone is not sufficient to prevent failure in applications involving high stresses, as hardness is typically accompanied by brittleness. In order to avoid brittle cracking, thin films must be both hard and relatively ductile, which is referred to as high toughness. In Paper 2, it is demonstrated that Zr1-xTaxBy thin films grown by hybrid high-power impulse and DC magnetron co-sputtering (Ta-HiPIMS/ZrB2-DCMS) with x ≥ 0.2 are not only hard, but also tough. The films with x ≥ 0.2 show a self-organized columnar core/shell nanostructure (see Paper 3), in which crystalline hexagonal Zr-rich stoichiometric Zr1-xTaxB2 cores are surrounded by narrow dense, disordered Ta-rich shells that are B-deficient.The disordered shells have the structural characteristics of metallic-glass thin films, which exhibit both high strength and toughness. Hence, such a nanostructure combines the benefits of crystalline diboride nanocolumns, providing the high hardness, with the dense metallic-glasslike shells, which give rise to enhanced toughness.The mechanical properties of Zr1-xTaxBy thin films annealed in Ar atmosphere are studied as a function of annealing temperature Ta up to 1200 °C in Paper 4. In-situ and ex-situ nanoindentation analyses reveal that all films undergo age hardening up to Ta = 800 °C, with the highest hardness achieved for Zr0.8Ta0.2B1.8 (45.5±1.0 GPa). The age hardening, which occurs without any phase separation or decomposition, can be explained by point-defect recovery that enhances chemical bond density. Although hardness decreases at Ta > 800 °C due mainly to recrystallization, column coarsening, and planar defect annihilation, all layers show hardness values above 34 GPa over the entire Ta range.The oxidation resistance of TiBx thin films is addressed in Paper 5. In general, TMB2 suffer from rapid high-temperature oxidation, which is a critical issue for many applications. In this study, it is demonstrated that alloying the films with Al significantly increases the oxidation resistance with only a slight decrease in hardness. Contrary to bulk TiB2 synthesized by powder metallurgy processes, the oxidation products of TiB2 thin films do not contain the B2O3 oxide scale, which is usually observed below 1000 °C in air, and merely consists of a TiO2 phase. The enhanced oxidation resistance is attributed to the formation of a dense, protective Al-containing oxide scale, which considerably decreases the oxygen diffusion rate by suppressing the oxidecrystallites coarsening.To realize the goal of fully multifunctional diborides, Zr1-xCrxBy thin films grown by hybrid Cr-HiPIMS/ZrB2-DCMS co-sputtering are studied in Paper 6. These layers exhibit a unique combination of high hardness, toughness, wear, oxidation, and corrosion resistance.The last paper (Paper 7) addresses the issue of efficient energy and resource consumption in industrial processes, which United Nations defines as one of the sustainable development goals. The idea here is to replace the conventionally used thermal-energy flux from resistive heaters with the irradiation by high mass metal ions (Hf+), which results in more efficient energy transfer to the deposited layer. We deposited Ti0.67Hf0.33B1.7 films using hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering at substrate temperature not exceeding 100 °C. Results reveal that dense layers can be achieved with high hardness values (> 40 GPa) even though no external substrate heating was used during the process.
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| 7. |
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| 8. |
- Bakhit, Babak, 1983-, et al.
(författare)
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Multifunctional ZrB2-rich Zr1-xCrxBy thin films with enhanced mechanical, oxidation, and corrosion properties
- 2021
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Ingår i: Vacuum. - : Elsevier BV. - 0042-207X .- 1879-2715. ; 185
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Tidskriftsartikel (refereegranskat)abstract
- Refractory transition-metal (TM) diborides have high melting points, excellent hardness, and good chemical stability. However, these properties are not sufficient for applications involving extreme environments that require high mechanical strength as well as oxidation and corrosion resistance. Here, we study the effect of Cr addition on the properties of ZrB2-rich Zr1-xCrxBy thin films grown by hybrid high-power impulse and dc magnetron co-sputtering (Cr-HiPIMS/ZrB2-DCMS) with a 100-V Cr-metal-ion synchronized potential. Cr metal fraction, x = Cr/(Zr+Cr), is increased from 0.23 to 0.44 by decreasing the power Pzrb2 applied to the DCMS ZrB2 target from 4000 to 2000 W, while the average power, pulse width, and frequency applied to the HiPIMS Cr target are maintained constant. In addition, y decreases from 2.18 to 1.11 as a function of Pzrb2, as a result of supplying Cr to the growing film and preferential B resputtering caused by the pulsed Cr-ion flux. ZrB2.18, Zr0.77Cr0.23B1.52, Zr0.71Cr0.29B1.42, and Zr0.68Cr0.32B1.38 2 films have hexagonal AlB2 crystal structure with a columnar nanostructure, while Zr0.64Cr0.36B1.30 and Zr0.56Cr0.44B1.11 are amorphous. All films show hardness above 30 GPa. Zr0.56Cr0.44B1.11 alloys exhibit much better toughness, wear, oxidation, and corrosion resistance than ZrB2.18. This combination of properties makes Zr0.56Cr0.44B1.11 ideal candidates for numerous strategic applications.
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| 9. |
- Bakhit, Babak
(författare)
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Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering
- 2024
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 42:1
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Tidskriftsartikel (övrigt vetenskapligt/konstnärligt)abstract
- Sputter-deposited transition metal diborides are subject of increasing attention for protective hard coatings. However, they suffer from high brittleness and rapid oxidation. Alloying with Ta increases their toughness, but their oxidation resistance requires further enhancement. Here, the influence of adding Si on the microstructure, mechanical, and oxidation properties of quaternary Zr1-(x + y)TaxSiyBz thin films grown by hybrid high-power impulse/DC magnetron co-sputtering (ZrB2-DCMS/Ta-HiPIMS/Si-DCMS) is studied. The layers are deposited at two different conditions of Ta-target HiPIMS powers and frequencies (30 W/100 Hz and 60 W/200 Hz series) with Si-target DCMS powers P-Si = 0, 10, 15, and 20 W, while the ZrB2-target DCMS power is maintained constant at 200 W. For the 30 W/100 Hz series, x decreases from 0.20 to 0.15, y increases from 0 to 0.22, and z decreases from 2.0 to 1.8 by increasing P-Si. The Ta/metal ratio remains constant at x = 0.3 for the 60 W/200 Hz series, while y increases from 0 to 0.1, and z decreases from 1.7 to 1.4. All layers show columnar growth and crystallize in a hexagonal-diboride structure, but crystal orientations change by increasing P-Si. The 60 W/200 Hz series have much denser microstructure than the 30 W/100 Hz series. The 60 W/200 Hz series have high hardness values (>= 35 GPa), while the hardness of the 30 W/100 Hz series significantly decreases from similar to 37 to similar to 21 GPa as a function of P-Si. Zr0.7Ta0.3B1.7 has markedly better high-temperature oxidation resistance than Zr0.8Ta0.2B2.0 due to the formation of protective B-containing oxide scales. Alloying with Si considerably decreases the oxidation rate of the 30 W/100 Hz series owing to the formation of oxide scales containing a ZrSiO4 phase with a thin Si oxide top layer; however, the oxidation rate increases for the 60 W/200 Hz series as these quaternary alloys do not contain sufficiently high B and Si to form oxidation protective barriers.
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| 10. |
- Bakhit, Babak, 1983-, et al.
(författare)
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Self-organized columnar Zr0.7Ta0.3B1.5 core/shell-nanostructure thin films
- 2020
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Ingår i: Surface & Coatings Technology. - : Elsevier. - 0257-8972 .- 1879-3347. ; 401
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Tidskriftsartikel (refereegranskat)abstract
- We recently showed that Zr1−xTaxBy thin films have columnar nanostructure in which column boundaries are B-rich for x < 0.2, while Ta-rich for x ≥ 0.2. Layers with x ≥ 0.2 exhibit higher hardness and, simultaneously, enhanced toughness. Here, we determine the atomic-scale nanostructure of sputter-deposited columnar Zr0.7Ta0.3B1.5 thin films. The columns, 95 ± 17 Å, are core/shell nanostructures in which 80 ± 15-Å cores are crystalline hexagonal-AlB2-structure Zr-rich stoichiometric Zr1−xTaxB2. The shell structure is a narrow dense, disordered region that is Ta-rich and highly B-deficient. The cores are formed under intense ion mixing via preferential Ta segregation, due to the lower formation enthalpy of TaB2 than ZrB2, in response to the chemical driving force to form a stoichiometric compound. The films with unique combination of nanosized crystalline cores and dense metallic-glass-like shells provide excellent mechanical properties.
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