| 1. |
- Brewer, Courtney A., et al.
(författare)
-
High spatial resolution full-field microscopy using a desktop-size soft x-ray laser
- 2007
-
Ingår i: Proceedings of SPIE. - : SPIE.
-
Konferensbidrag (refereegranskat)abstract
- Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hv = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.
|
|
| 2. |
- Brewer, Courtney A., et al.
(författare)
-
Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
- 2008
-
Ingår i: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 33:5, s. 518-520
-
Tidskriftsartikel (refereegranskat)abstract
- We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
|
|
| 3. |
- Brizuela, Fernando, et al.
(författare)
-
Efficient high order harmonic generation boosted by below threshold harmonics
- 2013
-
Ingår i: Scientific Reports. - : Springer Science and Business Media LLC. - 2045-2322. ; 3
-
Tidskriftsartikel (refereegranskat)abstract
- High-order harmonic generation (HHG) in gases has been established as an important technique for the generation of coherent extreme ultraviolet (XUV) pulses at ultrashort time scales. Its main drawback, however, is the low conversion efficiency, setting limits for many applications, such as ultrafast coherent imaging, nonlinear processes in the XUV range, or seeded free electron lasers. Here we introduce a novel scheme based on using below-threshold harmonics, generated in a seeding cell, to boost the HHG process in a generation cell, placed further downstream in the focused laser beam. By modifying the fundamental driving field, these low-order harmonics alter the ionization step of the nonlinear HHG process. Our dual-cell scheme enhances the conversion efficiency of HHG, opening the path for the realization of robust intense attosecond XUV sources.
|
|
| 4. |
- Brizuela, Fernando, et al.
(författare)
-
Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks
- 2010
-
Ingår i: Optics Express. - : Optical Society of America. - 1094-4087. ; 18:14, s. 14467-14473
-
Tidskriftsartikel (refereegranskat)abstract
- We have realized the first demonstration of a table-top aerial imaging microscope capable of characterizing pattern and defect printability in extreme ultraviolet lithography masks. The microscope combines the output of a 13.2 nm wavelength, table-top, plasma-based, EUV laser with zone plate optics to mimic the imaging conditions of an EUV lithographic stepper. We have characterized the illumination of the system and performed line-edge roughness measurements on an EUVL mask. The results open a path for the development of a compact aerial imaging microscope for high-volume manufacturing.
|
|
| 5. |
- Brizuela, Fernando, et al.
(författare)
-
Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes
- 2012
-
Ingår i: IEEE Journal of Selected Topics in Quantum Electronics. - 1077-260X. ; 18:1, s. 434-442
-
Tidskriftsartikel (refereegranskat)abstract
- The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope's spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.
|
|
| 6. |
- Brizuela, Fernando, et al.
(författare)
-
Table-top Extreme Ultraviolet Laser Aerial Imaging of Lithographic Masks
- 2010
-
Ingår i: 2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS). - 9781557528902
-
Konferensbidrag (refereegranskat)abstract
- We report the first at-wavelength line edge roughness measurements of patterned EUV lithography masks realized using a table-top aerial imaging system based on a table-top lambda=13.2 laser.
|
|
| 7. |
|
|
| 8. |
|
|
| 9. |
- Heyl, Christoph, et al.
(författare)
-
Macroscopic effects in noncollinear high-order harmonic generation.
- 2014
-
Ingår i: Physical Review Letters. - 1079-7114. ; 112:14
-
Tidskriftsartikel (refereegranskat)abstract
- We study two-color high-order harmonic generation using an intense driving field and its weak second harmonic, crossed under a small angle in the focus. Employing sum- and difference-frequency generation processes, such a noncollinear scheme can be used to measure and control macroscopic phase matching effects by utilizing a geometrical phase mismatch component, which depends on the noncollinear angle. We further show how spatial phase effects in the generation volume are mapped out into the far field allowing a direct analogy with temporal carrier envelope effects in attosecond pulse generation.
|
|
| 10. |
- Jarnac, Amelie, et al.
(författare)
-
Compression of TW class laser pulses in a planar hollow waveguide for applications in strong-field physics
- 2014
-
Ingår i: European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics. - : Springer Science and Business Media LLC. - 1434-6060. ; 68:12
-
Tidskriftsartikel (refereegranskat)abstract
- We demonstrate pulse post-compression of a TW class chirped pulse amplification laser employing a gas-filled planar hollow waveguide. A waveguide throughput of 80% is achieved for 50 mJ input pulse energy. Good focusability is found and after compression with chirped mirrors a pulse duration of sub-15 fs is measured in the beam center. Whereas a total energy efficiency of approximate to 70% should be achievable, our post-compressor currently delivers 20 mJ output pulse energy (approximate to 40% efficiency), mostly limited by apertures of chirped mirrors and vacuum windows. The viability of the planar hollow waveguide compression scheme for applications in strong-field physics is demonstrated by generating high-order harmonics in a pulsed Ar gas cell.
|
|
