| 3. |
- Popov, V., et al.
(författare)
-
Morphology of PZT-PMN films grown from airflow
- 2003
-
Ingår i: Integrated Ferroelectrics. - : Informa UK Limited. - 1058-4587 .- 1607-8489. ; 54, s. 575-584
-
Tidskriftsartikel (refereegranskat)abstract
- Lead zirconate titanate-lead magnesium niobate (PZT-PMN) films with thicknesses in the range 5 to 200 mum were fabricated by deposition from airflow at room temperature. Precursor powders of PZT and PMN were mixed in a ball mill and entrained in an airflow generated by a commercial jet-mill ( Micron-Master 02-506 ). Films were grown at a rate of 1 mum/minute onto the Ni and tungsten carbide substrates exposed to the air-powder mixture. Unfired, poled PZT-PMN films provided an audio acoustic response and form translucent 20-30 mum thick layers. Full density of the air-flow deposited materials has been achieved at temperatures 450degreesC lower than that typical for ball milled bulk PZT-PMN ceramics. After sintering for 2 hours at 850degreesC PZT-PMN ceramics with relative density of 99.5%, epsilon similar to 2170, tan delta similar to 0.009 @1 kHz and acceptable piezoelectric properties was obtained. Films sintered 2 hours at 1000degreesC showed remnant polarization P-r = 26 muC/cm(2) , P-s = 36 muC/cm(2) @95 kV/cm, and 50 Hz ac electric breakdown field as high as 120-170 kV/cm. Unusual grain morphology governs improved sinterability and enhanced properties of ferroelectric ceramics. Optical and AFM micrographs revealed needle-like grains preferentially oriented parallel to the air-powder stream. As-deposited films were found to be very non-uniform across the thickness: glass-like and with tensile strain on the contact surface. This strain is released and film microcrystalline structure becomes uniform in annealed film.
|
|
