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- Aijaz, Asim, et al.
(författare)
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Deposition of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering
- 2014
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- Vanadium dioxide exhibits a reversible phase transition from semiconducting state (monoclinic structure) to a metallic state (tetragonal structure) at ~68 oC. This so-called metal-insulator transition (MIT) entails thermochromic behavior manifested by large changes in optical properties, such as high infrared transmittance modulation in thin films, thereby making VO2-based films a suitable candidate for optical switching applications such as self-tunable infrared filters. Thermochromic VO2 thin films have been widely investigated for optical applications, but high growth temperatures (> 400 oC) required for synthesizing crystalline VO2 thin films, high MIT temperature (68 oC) as well as low visible transmittance (typically ~50%) limit their applicability for example for energy efficient smart windows. Synthesis of metal-oxide thin films using highly ionized vapor fluxes has been shown to facilitate low-temperature film growth as well as control over phase formation and resulting film properties. In the present work, we synthesize VO2 thin films by use of highly ionized vapor fluxes that are generated by high power impulse magnetron sputtering (HiPIMS). In order to establish a correlation between the plasma and film properties, we investigate the discharge characteristics by analyzing the discharge current-voltage characteristics under varied process parameters such as peak-power, pulse-width and gas phase composition and grow VO2 thin films under suitable process conditions. We investigate the effect of growth temperature (room temperature to 500 oC), energy of the deposition flux (controlled by substrate bias potential) and type of substrate (Si, glass, ITO-coated glass) on crystallinity, phase formation and on optical properties (visible transmittance and infrared modulation) of the resulting thin films. For reference, the discharge characteristics and properties of films deposited by pulsed direct current magnetron sputtering are also studied.
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2. |
- Aijaz, Asim, et al.
(författare)
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Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering
- 2016
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Ingår i: Solar Energy Materials and Solar Cells. - : Elsevier BV. - 0927-0248 .- 1879-3398. ; 149, s. 137-144
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Tidskriftsartikel (refereegranskat)abstract
- Thermochromic (TC) vanadium dioxide thin films provide means for controlling solar energy throughput and can be used for energy-saving applications such as smart windows. One of the factors limiting the deployment of VO2 films in TC devices is the growth temperature tau(s). At present, temperatures in excess of 450 degrees C are required, which clearly can be an impediment especially for temperature-sensitive substrates. Here we address the issue of high tau(s) by synthesizing VO2 thin films from highly ionized fluxes of depositing species generated in high power impulse magnetron sputtering (HiPIMS) discharges. The use of ions facilitates low-temperature film growth because the energy of the depositing species can be readily manipulated by substrate bias. For comparison, films were also synthesized by pulsed direct current magnetron sputtering. Structural and optical characterization of VO2 thin films on ITO-coated glass substrates confirms previous results that HiPIMS allows tau(s) to be reduced from 500 to 300 degrees C. Importantly, we demonstrated that HiPIMS permits the composition and TC response of the films to be tuned by altering the energy of the deposition flux via substrate bias. An optimum ion energy of 100 eV was identified, which points at a potential for further reduction of tau(s) thereby opening new possibilities for industrially-relevant applications of VO2-based TC thin films. Weak TC activity was observed even at tau(s) approximate to 200 degrees C in HiPIMS-produced films.
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4. |
- Alm, Oscar, et al.
(författare)
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Tungsten oxide nanoparticles synthesised by laser assisted homogeneous gas-phase nucleation
- 2005
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Ingår i: Applied Surface Science. - : Elsevier BV. - 0169-4332. ; 247:1-4, s. 262-267
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Tidskriftsartikel (refereegranskat)abstract
- Tungsten oxide nanoparticles were generated by excimer (ArF) laser assisted chemical vapor deposition from WF6/H2/O2/Ar gas mixtures. The deposited particles were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and transmission electron microscopy. The deposition rate as a function of the partial pressures of the reactants and of the laser fluence was measured by X-ray fluorescence spectroscopy. The mean diameter of the deposited tungsten oxide particles varied with the experimental parameters and was typically 23 nm. Particles with a higher degree of crystallinity were observed at a laser fluence exceeding 130 mJ/cm2, and X-ray amorphous particles were obtained below 110 mJ/cm2. The amorphous tungsten oxide had a stoichiometry ranging from WO2.7 to WO3. Deposits were formed only when hydrogen was present in the gas mixture.
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5. |
- Aroutiounian, V., et al.
(författare)
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Fluctuation-enhanced gas sensing
- 2009
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Ingår i: Procedia Chemistry. - : Elsevier BV. - 1876-6196.
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Konferensbidrag (refereegranskat)abstract
- The sensitivity of gas sensors was earlier measured by classical method-comparison the resistance of sensors in gas media and air. Here we reported results of the study of low-frequency noise characteristics of sensors. We compare data for different Figaro TGS sensors as well as our sol-gel H-2 tin dioxide and porous silicon sensors. The study was performed in dry air and in a mix of dry air with carbon monoxide, hydrogen and alcohol of different concentrations. Higher sensitivity of spectral dependence of noise (SDN) to gas concentration in comparison with classical method of the measurements of gas sensing by a change in the Ohmic resistance part of current-voltage characteristics of samples allows using such SND powerful method for determination of gas concentration in the air or environment.
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6. |
- Aroutiounian, Vladimir M., et al.
(författare)
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Noise spectroscopy of gas sensors
- 2008
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 8:5-6, s. 786-790
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Tidskriftsartikel (refereegranskat)abstract
- We study current-voltages and low-frequency noise characteristics of the metal-porous silicon-silicon single crystal-metal structure with 50% and 73% porosity of porous silicon. The study is performed in dry air and in a mix of dry air with carbon monoxide of different concentrations. The Hooge noise parameter alpha(H) and the parameter gamma in the frequency dependence of the noise voltage spectral density S-U (f) were determined from experimental data. High sensitivity of spectral dependence of noise to gas concentration allows offering powerful method for determination of gas concentration in the air or environment.
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8. |
- Arvizu, Miguel A, et al.
(författare)
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Electrochemical pretreatment of electrochromic WO3 films gives greatly improved cycling durability
- 2018
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Ingår i: Thin Solid Films. - : ELSEVIER SCIENCE SA. - 0040-6090 .- 1879-2731. ; 653, s. 1-3
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Tidskriftsartikel (refereegranskat)abstract
- Electrochromic WO3 thin films have important applications in devices such as smart windows for energy-efficient buildings. Long-term electrochemical cycling durability of these films is essential and challenging. Here we investigate reactively sputter-deposited WO3 films, backed by indium-tin oxide layers and immersed in electrolytes of LiClO4 in propylene carbonate, and demonstrate unprecedented electrochemical cycling durability after straight-forward electrochemical pretreatments by the application of a voltage of 6 V vs. Li/Li+ for several hours.
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9. |
- Arvizu, Miguel A., et al.
(författare)
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Electrochromic dc sputtered W1-x-y Moy Tix O3 thin films: : Optical properties and durability.
- 2016
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Konferensbidrag (refereegranskat)abstract
- The key component in an electrochromic (EC) device is its primary EC thin film. The outstanding intrinsic ECproperties of tungsten oxide (WO3) make this material the best option available for the cathodic layer in an ECdevice. Nevertheless much research remains in order to optimize WO3 with regard to optical properties, durability,etc. It is well known that addition of titanium (Ti) into the matrix of WO3 increases significantly the resistance of the film to electrochemical cycling both under norma loperation and during accelerated aging in extended voltage ranges [1]. On the other hand, using molybdenum (Mo) as an additive in small concentrations helps to improve the color rendering by shifting th eposition of the maximum of the coloration band to higher energies [2]. The present work reports our recent investigations on thin films of mixed oxides with a focus on ways to optimize tungsten oxide thin films regarding both their durability and color by the addition of Ti and Mo. The films were deposited by reactive DC cosputtering from Mo and W-Ti alloy targets. Cyclic voltammetry, in a three-electrode system consisting of the film and lithium foils, was performed in a solution 1 MLiClO4 in propylene carbonate (Li–PC) as electrolyte. Insitu and ex-situ optical characterization was done for the EC films, and the transmittance switching and coloration efficiency were determined. Durability was studied by analyzing how the charge density evolved and how rapidly the transmittance modulation deteriorated during cycling for the different concentrations of Mo and Ti .References[1] M.A. Arvizu, C.A. Triana, B.I. Stefanov, C.G.Granqvist , G.A. Niklasson, “Electrochromism in SputterdepositedW-Ti Oxide Films: Durability Enhancement dueto Ti”, Solar Energy Materials & Solar Cells 125 (2014)184-189 (and references therein).[2] M.A. Arvizu, C.G. Granqvist and G.A. Niklasson,“Electrochromism in sputter deposited W1–yMoyO3 thinfilms”, Journal of Physics: Conference Series 682 (2016)012005 (and references therein).
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10. |
- Arvizu, Miguel A, et al.
(författare)
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Electrochromic W(1-x-y)Ti(x)lo(y)O(3) Thin Films Made by Sputter Deposition : Large Optical Modulation, Good Cycling Durability, and Approximate Color Neutrality
- 2017
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Ingår i: Chemistry of Materials. - : American Chemical Society (ACS). - 0897-4756 .- 1520-5002. ; 29:5, s. 2246-2253
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Tidskriftsartikel (refereegranskat)abstract
- Tungsten oxide thin films are used in electrochromic devices such as variable-transmittance "smart windows" for energy efficient buildings with good indoor comfort. Two long-standing issues for WO3 thin films are their limited durability under electrochemical cycling and their blue color in transmission. Here, we show that both of these problems can be significantly alleviated by additions of titanium and molybdenum. We found that similar to 300 nm-thick films of sputter deposited W1-x-yTixMoyO3 are able to combine a midluminous transmittance modulation of 0.4 similar to 70% with good color neutrality and durability under extended electrochemical cycling. The Ti content should be similar to 10 at. % in order to achieve durability without impairing transmittance modulation significantly, and the Mo content preferably should be no larger than 6 at. % in order to maintain durability. Hence, our results give clear guidelines for making three-component mixed-oxide thin films that are suitable for electrochromic "smart windows".
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