| 1. |
- Gudmundsson, Jon Tomas, 1965-, et al.
(författare)
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On the role of metastable states in low pressure oxygen discharges
- 2017
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Ingår i: <em>AIP Conference Proceedings</em>. - : American Institute of Physics (AIP).
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Konferensbidrag (refereegranskat)abstract
- We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to explore the spatio-temporal evolution of the electron heating mechanism in a capacitively coupled oxygen discharge in the pressure range 10 – 200 mTorr. The electron heating is most significant in the sheath vicinity during the sheath expansion phase. We explore how including and excluding detachment by the singlet metastable states O2(a1 Δg) and O2(b1Σ+g) influences the heating mechanism, the effective electron temperature and electronegativity, in the oxygen discharge. We demonstrate that the detachment processes have a significant influence on the discharge properties, in particular for the higher pressures. At 10 mTorr the time averaged electron heating shows mainly ohmic heating in the plasma bulk (the electronegative core) and at higher pressures there is no ohmic heating in the plasma bulk, that is electron heating in the sheath regions dominates.
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| 2. |
- Gudmundsson, Jon Tomas, 1965-, et al.
(författare)
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The role of the metastable O2(b) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges
- 2016
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Ingår i: Plasma sources science & technology. - : Institute of Physics (IOP). - 0963-0252 .- 1361-6595. ; 25:5
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Tidskriftsartikel (refereegranskat)abstract
- The effects of including the singlet metastable molecule O2(b) in the discharge model of a capacitively coupled rf driven oxygen discharge are explored. We furthermore examine the addition of energy-dependent secondary electron emission yields from the electrodes to the discharge model. The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is used for this purpose, with the oxygen discharge model considering the species O2,(X3Σg -)O2(a1Σg),O2(b1Σg +), O(3P), O(1D), O2 +, O+, O-, and electrons. The effects on particle density profiles, the electron heating rate profile, the electron energy probability function and the sheath width are explored including and excluding the metastable oxygen molecules and secondary electron emission. Earlier we have demonstrated that adding the metastable O2(a1Σg) to the discharge model changes the electron heating from having contributions from both bulk and sheath heating to being dominated by sheath heating for pressures above 50 mTorr. We find that including the metastable O2(b1Σg +) further decreases the ohmic heating and the effective electron temperature in the bulk region. The effective electron temperature in the electronegative core is found to be less than 1 eV in the pressure range 50-200 mTorr which agrees with recent experimental findings. Furthermore, we find that including an energy-dependent secondary electron emission yield for -ions has a significant influence on the discharge properties, including decreased sheath width.
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| 3. |
- Hannesdottir, Holmfridur, et al.
(författare)
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On singlet metastable states, ion flux and ion energy in single and dual frequency capacitively coupled oxygen discharges
- 2017
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Ingår i: Journal of Physics D. - : Institute of Physics (IOP). - 0022-3727 .- 1361-6463. ; 50:17
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Tidskriftsartikel (refereegranskat)abstract
- We apply particle-in-cell simulations with Monte Carlo collisions to study the influence of the singlet metastable states on the ion energy distribution in single and dual frequency capacitively coupled oxygen discharges. For this purpose, the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is used, in which the discharge model includes the following nine species: electrons, the neutrals O(3P) and O), the negative ions O−, the positive ions O+ and O, and the metastables O(1D), O and O2(b). Earlier, we have explored the effects of adding the species O) and O2(b), and an energy-dependent secondary electron emission yield for oxygen ions and neutrals, to the discharge model. We found that including the two molecular singlet metastable states decreases the ohmic heating and the effective electron temperature in the bulk region (the electronegative core). Here we explore how these metastable states influence dual frequency discharges consisting of a fundamental frequency and the lowest even harmonics. Including or excluding the detachment reactions of the metastables O) and O2(b) can shift the peak electron temperature from the grounded to the powered electrode or vice versa, depending on the phase difference of the two applied frequencies. These metastable states can furthermore significantly influence the peak of the ion energy distribution for O-ions bombarding the powered electrode, and hence the average ion energy upon bombardment of the electrode, and lower the ion flux.
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