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- Arslan, Aslihan, et al.
(författare)
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Mechanically Coupled Comb Drive MEMS Stages
- 2008
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Ingår i: 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS; Freiburg; Germany; 11 August 2008 through 14 August 2008. - 9781424419180 ; , s. 140-141
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Konferensbidrag (refereegranskat)abstract
- An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
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| 2. |
- Emadi, A., et al.
(författare)
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An UV linear variable optical filter-based micro-spectrometer
- 2010
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Ingår i: Procedia Engineering, Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria. - : Elsevier BV. - 1877-7058. ; 5, s. 416-419
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Konferensbidrag (refereegranskat)abstract
- This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm - 400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the LVOF, shows high linearity of the profile. It is expected that using signal processing, spectral resolution better than 0.5 nm can be achieved with this UV LVOF. The filter provides the possibility to have a robust high-resolution micro-spectrometer in the UV on a CMOS chip.
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| 3. |
- Emadi, A., et al.
(författare)
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Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer
- 2010
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Ingår i: Sensors and Actuators, A: Physical. - : Elsevier BV. - 0924-4247. ; 162:2; Sp. Iss. SI, s. 400-405
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Tidskriftsartikel (refereegranskat)abstract
- This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 degrees to 0.1 degrees. are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented. (C) 2010 Elsevier B.V. All rights reserved.
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| 4. |
- Emadi, Arvin, et al.
(författare)
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Spectral measurement using IC-compatible linear variable optical filter
- 2010
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Ingår i: Proc. of SPIE. - : SPIE. ; 7716
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Konferensbidrag (refereegranskat)abstract
- This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detectorarray covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resistreflow. A pattern of trenches is made in a resist layer by lithography and followed by a reflow step result in a smoothtapered resist layer. The lithography mask with the required pattern is designed by a simple geometrical model and FEMsimulation of reflow process. The topography of the tapered resist layer is transferred into silicon dioxide layer by anoptimized RIE process. The IC-compatible fabrication technique of such a LVOF, makes fabrication directly on aCMOS or CCD detector possible and would allow for high volume production of chip-size micro-spectrometers. TheLVOF is designed to cover the 580 nm to 720 spectral range. The dimensions of the fabricated LVOF are 5×5 mm2. TheLVOF is placed in front of detector chip of a commercial camera to enable characterization. An initial calibration isperformed by projecting monochromatic light in the wavelength range of 580 nm to 720 nm on the LVOF and thecamera. The wavelength of the monochromatic light is swept in 1 nm steps. The Illuminated stripe region on the cameradetector moves as the wavelength is swept. Afterwards, a Neon lamp is used to validate the possibility of spectralmeasurement. The light from a Neon lamp is collimated and projected on the LVOF on the camera chip. After dataacquisition a special algorithm is used to extract the spectrum of the Neon lamp.
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| 6. |
- Enoksson, Peter, 1957, et al.
(författare)
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Micro- and Nanosystems for Sensing in Medicine
- 2008
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Ingår i: Proceedings of Medicinteknikdagarna 2008, 14-15 October, Göteborg, Sweden. ; , s. 117-
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)
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| 7. |
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| 8. |
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| 9. |
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| 10. |
- Hedsten, Karin, 1964, et al.
(författare)
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Downscaling Optical Biosensing System
- 2008
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Ingår i: Proceedings of Micro System Workshop 2008 (MSW08) 6-7 Maj, Göteborg, Sweden. ; MSW08, s. S2-6, s. 205-
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Konferensbidrag (refereegranskat)
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