| 1. |
- Anand, Srinivasan, et al.
(författare)
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Towards realization of high quality 2D-photonic crystals in InP/GaInAsP/InP
- 2004
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Ingår i: 2004 International Conference on Indium Phosphide and Related Materials, Conference Proceedings. - 0780385950 ; , s. 311-313
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Konferensbidrag (refereegranskat)abstract
- Two-dimensional photonic crystals (PhCs) were etched into InP/GaInAsP/InP planar waveguides using chlorine based chemical assisted ion beam etching (CAIBE). Etching mechanisms and process parameters crucial for high quality PhC definition are discussed, with special attention to the lag-effect. The processed PhCs were optically characterized by measuring transmission through simple slabs and one-dimensional cavities. The optical properties inside the photonic bandgap are much better compared to both previously reported CAME results and results obtained with other etching methods. In particular, we measured a record quality factor of 310 for one-dimensional cavities fabricated in this material system.
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| 2. |
- Benisty, H., et al.
(författare)
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Low-loss photonic-crystal and monolithic InP integration : Bands, bends, lasers, filters
- 2004
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Ingår i: Photonic Crystal Materials and Devices II. - : SPIE - International Society for Optical Engineering. - 0819452688 ; , s. 119-128
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Konferensbidrag (refereegranskat)abstract
- Practical realizations of 2D (planar) photonics crystal (PhC) are either on a membrane or etched through a conventional heterostructure. While fascinating objects can emerge from the first approach, only the latter approach lends itself to a progressive integration of more compact PhC's towards monolithic PICs based on InP. We describe in this talk the various aspects from technology to functions and devices, as emerged from the European collaboration "PCIC". The main technology tour de force is deep-etching with aspect ratio of about 10 and vertical sidewall, achieved by three techniques (CAIBE, ICP-RIE, ECR-RIE). The basic functions explored are bends, splitters/combiners, mirrors, tapers, and the devices are filters and lasers. At the end of the talk, I will emphasize some positive aspects of "broad" multimode PhC waveguides, in view of compact add-drop filtering action, notably.
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| 3. |
- Benisty, H., et al.
(författare)
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Models and measurements for the transmission of submicron-width waveguide bends defined in two-dimensional photonic crystals
- 2002
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Ingår i: IEEE Journal of Quantum Electronics. - 0018-9197 .- 1558-1713. ; 38:7, s. 770-785
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Tidskriftsartikel (refereegranskat)abstract
- One of the essential building-blocks of miniature photonic crystal (PC)-based photonic integrated circuits (PICs) is the sharp bend. Our group has focused on the 2-D photonic crystal based on a triangular lattice of holes perforating a standard heterostructure. The latter, GaAlAs-based or InP-based, is vertically a monomode waveguide. We consider essentially one or two 60 bends defined by one to five missing rows, spanning both cases of monomode and multimode channel waveguides. From intensive modeling and various experimental measurements (both on GaAs and InP), we point out the origin of the present level of bend insertion losses and discuss the merits of the many roads open for improved design.
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| 4. |
- Berrier, Audrey, et al.
(författare)
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Characterization of the feature-size dependence in Ar/Cl2 chemically assisted ion beam etching of InP-based photonic crystal devices
- 2007
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Ingår i: Journal of Vacuum Science & Technology B. - : American Vacuum Society. - 1071-1023 .- 1520-8567. ; 25:1, s. 1-10
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Tidskriftsartikel (refereegranskat)abstract
- The authors address feature-size dependence in Ar/Cl-2, chemically assisted ion beam etching (CAIBE) in the context of the fabrication of photonic crystal (PhC) structures. They systematically investigate the influence of various parameters such as hole diameter (115-600 nm), etch duration (10-60 min), and ion beam energy (300-600 eV) on PhC etching in InP with Ar/Cl-2, CAIBE. For a 60 min etching at an Ar-ion energy of 400 eV, the authors report an etch depth of 5 mu m for hole diameters d larger than 300 nm; the etch depth is in excess of 3 mu m for d larger than 200 nm. The evolution of roughness at the bottom of the etched holes and its dependence on hole size and etching conditions,is discussed. The physical mechanism of the observed feature-size dependent etching (FSDE) is then discussed and the effect of the process parameters is qualitatively understood using a model combining the effect of ion sputtering and surface chemical reactions. Finally, the effect of FSDE on the PhC optical properties is assessed by measuring the quality factor of one-dimensional Fabry-Perot PhC cavities. The measured quality factors show a clear trend with the etch depth: the cavity Q increases as the etch depth increases.
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| 5. |
- Berrier, Audrey, et al.
(författare)
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Feature size effects in chemically assisted ion beam etching of InP-based photonic crystals - art. no. 632707
- 2006
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Ingår i: Nanoengineering: Fabrication, Properties, Optics, and Devices III. - BELLINGHAM, WA : SPIE-INT SOC OPTICAL ENGINEERING. - 0819464066 ; , s. 32707-32707
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Konferensbidrag (refereegranskat)abstract
- This work addresses feature size effects (the lag-effect and roughness development) in chemically assisted ion beam etching (CAIBE) etching of InP-based photonic crystals. Photonic crystal fields with varying hole size and periods were etched with different etching times. The slope of the etch depth versus diameter curves (lag-curves) reveals a hole size dependence, with a critical aspect ratio higher than 25. A model for the etch rate specific to Ar/Cl-2 CAIBE is proposed. We calculate the etch rate using a physico-chemical model which takes in to account the effect of Ar-ion sputtering and surface chemical reactions. In addition, it combines the aspect ratio dependence of the gas conductance of the etched holes. The origin and evolution of the bottom roughness of the etched holes is examined. The impact of the feature size dependence of the etching on the photonic crystal optical properties is then assessed by measuring the quality-factor of one-dimensional Fabry-Perot cavities using the Internal Light Source method, and discussed in terms of hole shape and depth. A systematic trend between the determined quality factor (Q) and the lag-effect is evidenced: Q decreases from about 250 to 60 when the hole depth drops from 5 mu m to 2 mu m.
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| 6. |
- Berrier, Audrey, et al.
(författare)
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Impact of feature-size dependent etching on the optical properties of photonic crystal devices
- 2008
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 103:9, s. 096106-1-096106-3
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Tidskriftsartikel (refereegranskat)abstract
- Feature size dependence in Ar/Cl-2 chemically assisted ion beam etching of InP-based photonic crystals (PhCs) and its influence on the optical properties of PhC devices operating in the band gap are investigated. The analysis of the measured quality factors, the determined mirror reflectivities, and losses of one-dimensional Fabry-Perot cavities clearly demonstrates the importance of feature-size dependent etching. The optical properties show a dramatic improvement up to a hole depth of about 3.5 mu m that is primarily due to a significant reduction in extrinsic losses. However, beyond this hole depth, the improvement is at a lower rate, which suggests that extrinsic losses, although present, are not dominant.
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| 7. |
- El-Kallassi, P., et al.
(författare)
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Optical and local tuning of planar photonic crystals infiltrated with organic molecules
- 2007
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Ingår i: Conference on Lasers and Electro-Optics, 2007, CLEO 2007. - 9781557528346 ; , s. 1375-1376
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Konferensbidrag (refereegranskat)abstract
- We report on the optical tuning of InP-based planar photonic crystals (PhCs) infiltrated with a photoresponsive liquid crystal system. Preliminary results on the local tuning of PhC devices are also presented.
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| 8. |
- El-Kallassi, P., et al.
(författare)
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Optical and local tuning of planar photonic crystals infiltrated with organic molecules
- 2007
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Ingår i: Lasers and Electro-Optics, 2007 European Conference on and the International Quantum Electronics Conference. - 1424409306 - 9781424409303 ; , s. 4387041-
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Konferensbidrag (refereegranskat)abstract
- We report on the optical tuning of InP-based planar photonic crystals infiltrated with a photoresponsive liquid crystal system. Preliminary results on the local tuning of infiltrated structures are also presented.
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| 9. |
- Ferrini, R., et al.
(författare)
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Minimization of out-of-plane losses in planar photonic crystals by optimizing the vertical waveguide
- 2004
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 85:18, s. 3998-4000
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Tidskriftsartikel (refereegranskat)abstract
- A two-dimensional phenomenological approach previously developed for the modeling of out-of-plane losses in low refractive index contrast planar photonic crystals (PPhCs) is used to study the dependence of the different loss terms on the planar waveguide parameters. It is demonstrated that: (i) Losses can be minimized by designing vertical heterostructures optimized for a given technological process and/or for a given hole shape; and (ii) any small reduction of the loss value has a strong impact on the optical performances of PPhC structures.
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| 10. |
- Ferrini, R., et al.
(författare)
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Optical study of two-dimensional InP-based photonic crystals by internal light source technique
- 2002
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Ingår i: IEEE Journal of Quantum Electronics. - 0018-9197 .- 1558-1713. ; 38:7, s. 786-799
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Tidskriftsartikel (refereegranskat)abstract
- We present the first optical study of 2-D photonic crystals (PCs) deeply etched in an InP/GaInAsP step-index waveguide. Following the same internal light source approach proposed by Labilloy and coworkers for the investigation of GaAs-based 2-D PCs, transmission measurements through simple PC slabs and 1-D Fabry-Perot (FP) cavities between PC mirrors were performed. Details are given on the experimental setup which has been implemented with respect to the original scheme and adapted to InP-based systems working at 1.5-mum. 2-D plane-wave expansion and finite difference time-domain (FDTD) methods are used to fit the experimental data. Out-of-plane losses were evaluated according to a recently introduced phenomenological model. In spite of the complex hole morphology in the measured samples, preliminary results are presented which indicate the possibility of separating different loss contributions from finite etch depth and hole shape. As for 1-D cavities, both FDTD and classical theory for planar resonators are applied in order to deduce the optical properties of the PC mirrors. The origin of an anomalously high transmission observed inside the stopgap is discussed and arguments are given to demonstrate the need for further modeling efforts when working in the bandgap regime.
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