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Sökning: WFRF:(Iachuk V. A.)

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1.
  • Lubenschenko, A., et al. (författare)
  • Controlled Ultra-Thin Suboxide Films Generation in Metal-Oxide Systems by Ar + Ion Irradiation
  • 2020
  • Ingår i: Journal of Physics: Conference Series. - : IOP Publishing. - 1742-6588 .- 1742-6596. ; 1695:1
  • Konferensbidrag (refereegranskat)abstract
    • A method of controlled generation of metal suboxide films is proposed, basing on low-current ion sputtering of native oxides of ultra-thin metallic films and XPS chemical and phase depth profiling. Niobium suboxide ultra-thin films are generated and controlled using this approach.
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2.
  • Lubenschenko, A., et al. (författare)
  • Interface Layers of Niobium Nitride Thin Films
  • 2019
  • Ingår i: Journal of Physics: Conference Series. - : IOP Publishing. - 1742-6588 .- 1742-6596. ; 1410:1
  • Konferensbidrag (refereegranskat)abstract
    • Intermediate layers formed by thin NbN films are studied. A surface phase of NbN different from the bulk one under the oxide layer and a layer consisting of NbNx-SiOy between the film and the substrate are found.
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3.
  • Lukiantsev, Denis S., et al. (författare)
  • The Formation of nanosuboxide layers in the oxide of niobium in low-power ion beam of argon
  • 2021
  • Ingår i: Proceedings of the 3rd 2021 International Youth Conference on Radio Electronics, Electrical and Power Engineering, REEPE 2021.
  • Konferensbidrag (refereegranskat)abstract
    • This paper presents the results of chemical, quantitative, and layer-by-layer phase analysis of a 10 nm thick niobium thin film created by magnetron sputtering and subsequently oxidized in air. The analysis was performed before and after long-term delicate modification by argon ions by X-ray photoelectron spectroscopy using numerical simulation of the interaction of ion beams with the target surface in the SRIM software package. At different durations of low-current ion sputtering of niobium oxide, the formation of metastable stoichiometric and non-stoichiometric nanosuboxide layers of various thicknesses, as well as their sputtering, was found. The study shows that it is possible to create the necessary nanosuboxide layers, the structure of which is determined by the performance of functional devices.
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  • Resultat 1-3 av 3

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