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Träfflista för sökning "WFRF:(Kondratenko Valeriy V.) "

Sökning: WFRF:(Kondratenko Valeriy V.)

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1.
  • Brewer, Courtney A., et al. (författare)
  • High spatial resolution full-field microscopy using a desktop-size soft x-ray laser
  • 2007
  • Ingår i: Proceedings of SPIE. - : SPIE.
  • Konferensbidrag (refereegranskat)abstract
    • Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hv = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.
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2.
  • Brewer, Courtney A., et al. (författare)
  • Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
  • 2008
  • Ingår i: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 33:5, s. 518-520
  • Tidskriftsartikel (refereegranskat)abstract
    • We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
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