| 1. |
- Beck, Marc, et al.
(författare)
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Fabrication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes
- 2002
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Ingår i: 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science.
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Konferensbidrag (refereegranskat)abstract
- When making nanoelectrodes for applications in liquid cells it is plausible that the less noble metal layer may be negatively affected, i.e. it will be etched away leading to very unstable conditions during operation. Here we describe a dry method to produce such a molecular layer consisting of mercaptopropyltriethoxysilane (MPTS) making it possible to controllable and reproducibly form a covalently bound monolayer of MPTS to the SiO2 surface. From Photoelectron Spectroscopy measurements we could conclude that the layer thickness corresponds to a monolayer. We have electrochemically characterized such electrodes by cyclic voltammetry. Furthermore, we have successfully patterned such layers at both micro- and nanometer scale showing the possibilities to fabricate chemically selective and active areas that may be used in various applications
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| 2. |
- Keil, M, et al.
(författare)
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Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography
- 2005
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Ingår i: Journal of Vacuum Science and Technology B. - : American Vacuum Society. - 1520-8567. ; 23:2, s. 575-584
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Tidskriftsartikel (refereegranskat)abstract
- In this study we will report on the development of a process to establish antisticking layers on nickel-based stamps, which are used in several industrial applications of nanoimprint lithography or related methods. The fluorinated alkyl silane films have been deposited onto different Ni-based stamp surfaces in order to minimize the adhesion tendency at the stamp/polymer interface. film thickness, chemical composition, purity, and binding mechanisms of the silane groups to different stamp surface materials have been determined by photoelectron spectroscopy (XPS). In the case of electroplated nickel stamps-where low imprint qualities are observed-multilayer thick films cover, the stamp surfaces, consisting of polymerized, cross-linked alkyl silanes, which are poorly bound to the surface. In order to overcome these restrictions a. 100 angstrom thick polycrystalline titanium layer has been established in a sandwich position between the nickel substrate and the silane film. Here, silane film thicknesses in the monomolecular region together with evidences for strong covalent linkage between the silane groups and the oxidized Ti surface can be concluded from the XPS results, leading to film properties and imprint qualities, which are comparable to those formerly observed for silicon stamps.
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| 3. |
- Ling, T.G.I., et al.
(författare)
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The organic/inorganic interface: a study of direct electron transfer
- 2002
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Ingår i: 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science.
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Konferensbidrag (refereegranskat)abstract
- Porphyrins have become an interesting class of molecules in studies of molecular electronics. They are, however, sensitive to handling procedures and may give different results in electronic or optical properties depending on the method used for coupling or adsorption. We present electronic measurements of a heme porphyrin mounted in a biomolecular structure-an enzyme-and show that a direct electron transfer between the enzyme and the electrode results from a chemical reaction
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| 4. |
- Montelius, L., et al.
(författare)
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Novel all-silicon sensor structure with integrated poly-Si electrodes
- 1996
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Ingår i: ; , s. 2071-2072
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Konferensbidrag (refereegranskat)abstract
- The interest in miniaturization of modern chemical and medical sensors is steadily increasing. However, when employing methods and fabrication procedures especially developed for microelectronics, one may encounter new and unpredictable problems for applications in aqueous media. For instance, in microelectronics often a dual metal layer system is employed for making electrical contacts. In a solution such a contact may result in galvanic reactions and/or may dissolved in the cleaning agents used for sterilization of medical devices. To address such issues we have employed an all-silicon based process technology for fabrication of sturdy and reliable devices with integrated poly-Silicon electrodes that tolerate most chemical environments. In this presentation we will report on the first results using such electrodes. A comparative study between identical poly-Si and Aluminium electrodes was made in order to investigate the usefulness of poly-Si electrodes. We will also demonstrate the nice possibility to use well-documented methods for surface modifications using silane coupling chemistry. We believe this added benefit for the silicon based electrodes of easy surface modification processes, as compared with metal electrodes, to be extremely valuable for the development of accurate and tailored sensor structures for specific applications.
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